Related by context. All words. (Click for frequent words.) 78 EUVL 76 EUV 72 extreme ultraviolet lithography 72 immersion lithography 71 lithography 69 extreme ultraviolet EUV 69 imprint lithography 69 #nm node [001] 67 computational lithography 67 optical lithography 67 photomasks 66 nm lithography 66 nm node 65 photomask 65 maskless lithography 64 nano imprint 64 extreme ultra violet 64 nanoimprint 64 e beam lithography 63 ArF immersion lithography 63 EUV resists 63 photolithography 63 nm immersion 63 #nm immersion 63 #/#nm 63 #nm CMOS [001] 62 nanolithography 62 #nm nodes 62 XT #i 62 TSVs 61 3D TSV 61 Gigaphoton 61 CMOS compatible 61 nanometer node 61 Lithography 61 nm CMOS 61 #nm [001] 61 #nm DRAM 61 nano imprint lithography 61 SOI CMOS 60 #nm immersion lithography 60 nm nodes 60 dielectric etch 60 EUV mask 60 nm CMOS process 60 CMOS 60 #nm silicon 60 deep ultraviolet DUV 59 deep submicron CMOS 59 2Xnm 59 mm wafers 59 Molecular Imprints 59 maskless 59 nanometer 59 CMOS fabrication 59 nanometer CMOS 59 GaN HEMT 59 smaller geometries 59 mm wafer 59 micro optics 59 deep submicron 59 high-k/metal gate 58 CMOS processes 58 millimeter wafer 58 #nm #nm [005] 58 Photolithography 58 semiconductor lithography 58 deep sub micron 58 BEOL 58 photoresists 58 SEMATECH 58 #nm lithography [001] 58 ITRS roadmap 58 .# micron 58 TFPV 58 XDR DRAM 58 Extreme Ultraviolet EUV 58 #mm wafer 58 #.#μm [002] 58 Double Patterning 58 RRAM 58 #mm wafers 58 ArF 58 photoresist 58 millimeter silicon wafers 58 monolithic microwave integrated 58 EUV masks 58 silicon photonics 58 #.# micron node 58 argon fluoride 57 TMOS display 57 SOI wafers 57 ArF immersion 57 #.# micron CMOS 57 FinFET 57 copper interconnects 57 TSMC #nm process 57 holographic storage 57 sSOI 57 lithographic 57 #nm SOI 57 micro machining 57 nanopatterning 57 through silicon vias 57 Complementary Metal Oxide Semiconductor 57 #nm MirrorBit 57 lithography simulation 57 NuFlare 57 Extreme Ultra Violet 57 3Xnm 57 DFEB 57 nano patterning 57 PROLITH 57 photonic devices 57 EUV Lithography 57 silicon photovoltaics 57 Aera2 57 wafer bonder 57 optical waveguides 57 EBDW 57 SUSS MicroTec 57 MALDI 57 VUV 57 Photomask 56 #nm Buried Wordline 56 nanometer nm 56 SiP 56 Immersion Lithography 56 mask optimization SMO 56 FeRAM 56 FDSOI 56 wafer bonding 56 micromirror 56 DPSS lasers 56 #nm fabrication 56 silicon MEMS 56 amorphous silicon Si 56 CMOS scaling 56 nm 56 #nm RF CMOS 56 nanoimprinting 56 #nm photomask 56 backside illumination 56 microbolometers 56 correction OPC 56 Silicon CMOS Photonics 56 low k dielectrics 56 SiGen 56 package SiP 56 microbolometer 56 metallization 56 UV LED 56 #nm/#nm 56 glass substrate 56 CIGS cells 56 MB#K# 56 design kits PDKs 56 mmWave 56 Semiconductors ITRS 56 OLED displays 55 IEDM 55 #μm thick [002] 55 Aerosol Jet 55 SiON 55 CIGS 55 BrightLase 55 #nm wavelength [001] 55 Silicon Photonics 55 CMOS logic 55 BCDMOS 55 DFEB mask technology 55 UV NIL 55 nanoimprint lithography 55 EUV resist 55 optical interconnects 55 Crolles2 55 C4NP 55 photolithographic 55 Richard Brilla CNSE 55 CMOS transistors 55 #nm node [002] 55 BiCMOS 55 photodetectors 55 VCSELs 55 reticle inspection 55 monolithically integrated 55 silicon germanium SiGe 55 CMOS sensors 55 nm FPGAs 55 epitaxy 55 photomask inspection 55 FE SEM 55 HEMTs 55 Rapid prototyping 55 nanometer silicon 55 Kovio 55 CMOS oscillators 55 photonic integration 55 Crolles2 Alliance 55 ASML lithography 55 millisecond anneal 55 k dielectric 55 nm immersion lithography 55 nanosilicon 55 #.#μm CMOS process 55 planar CMOS 55 embedded nonvolatile memory 55 #mm MEMS 54 silicon 54 overlay metrology 54 CIGS solar 54 semiconductor 54 productization 54 FLCOS 54 Buried Wordline technology 54 X ray microscopy 54 FinFETs 54 Gallium Arsenide 54 nanoelectronic 54 Tachyon OPC + 54 Silicon Germanium 54 Gallium Nitride 54 cathode materials 54 ASML TWINSCAN 54 bipolar transistors 54 manufacturable 54 WLCSP 54 TWINSCAN NXT 54 silicon germanium 54 indium gallium arsenide InGaAs 54 Wafer Level Packaging 54 amorphous silicon 54 silicon CMOS 54 TestKompress 54 XLR #i 54 Flex OneNAND 54 CMP consumables 54 lithographic processes 54 UMC #nm 54 GaN 54 LTPS 54 Indium Phosphide 54 CMOS photonics 54 FD SOI 54 Esatto Technology 54 tunable RF 54 wafer thinning 54 MRAMs 54 nanometer transistors 54 picosecond lasers 54 CMOS wafer 54 CIGS PV 54 microfocus X ray 54 microfabrication 54 nanotechnology MEMS 54 Cortex M0 processor 54 k dielectrics 54 engineered substrates 54 Chip Scale 54 k gate dielectrics 54 Sematech 54 nitride semiconductor 54 millisecond annealing 54 gallium nitride GaN 54 OneChip 54 porous silicon 54 MEMS 54 CIGS solar cells 54 ML#Q# 54 wafer dicing 54 MOS transistor 54 FEOL 54 Laurent Malier CEO 54 BiFET 54 #nm [002] 54 Altera FPGAs 54 k gate dielectric 54 Gallium Nitride GaN 54 electron beam lithography 54 epi wafers 54 TSMC #nm [001] 54 CIGSe 53 insulator substrate 53 GX# [003] 53 plasma etch 53 Spintronics 53 mask aligners 53 SOI substrates 53 WS CRDS 53 Cortex A9 processor 53 LCOS 53 ReRAM 53 ion implantation 53 QCLs 53 TWINSCAN XT #i 53 HKMG 53 high-k/metal-gate 53 QuantumFilm 53 inertial MEMS 53 pHEMT 53 Clear Shape 53 scanning electron microscope SEM 53 Imprio 53 flexible substrates 53 eWLB 53 high voltage BCDMOS 53 #nm fab 53 #nm NAND flash 53 Energetiq 53 laser annealing 53 laser scribing 53 RF CMOS 53 Silicon Germanium SiGe 53 Synopsys DesignWare IP 53 silicon wafer 53 multijunction solar cells 53 EVG# 53 epiwafers 53 DesignWare Verification IP 53 CRIUS 53 VCSEL 53 MoSys 1T SRAM 53 Nanochip 53 vapor deposition 53 immersion litho 53 micromorph 53 RFCMOS 53 Nextreme 53 IMEC 53 IEEE #.#.#a standard 53 DongbuAnam 53 millimeter wafers 53 wafer 53 CMOS MEMS 53 metrology 53 planarization 53 EUVA 53 nm DRAM 53 indium tin oxide ITO 53 microlithography 53 ownership CoO 53 ARM#EJ processor 53 Tokyo Electron Limited 53 PeakView 53 Miyachi Unitek 53 transistor arrays 53 nm SRAM 53 wafer thickness 53 #mm fab 53 circuit MMIC 53 photodiode 53 MetaRAM 53 Luxtera 53 SPIE Advanced Lithography 53 MEMS oscillator 53 D1X 53 Grätzel cells 53 #G DQPSK 53 spectroscopic methods 53 wafer fabs 53 photoresist strip 53 OmniPixel2 53 #nm HKMG 53 deep silicon etch 53 silicon foundries 53 Elpida #nm 53 InP 53 PECVD 53 SOI wafer 53 semiconductor fabrication 53 multichip 53 3GPP LTE 53 embedded NVM 53 selective emitter 53 numerical aperture 53 tunable laser 53 oxide semiconductor 53 #nm chips 52 F3D 52 CMOS silicon 52 nanophotonics 52 Lightspeed Logic 52 electron optics 52 DUV 52 terahertz 52 #nm nanometer 52 nanometer lithography 52 active matrix OLED 52 #GBASE LRM 52 CMOS IC 52 CMOS Photonics 52 PolyIC 52 sub micron 52 perpendicular recording 52 Flip Chip 52 PHEMT 52 ARM# MPCore processor 52 nm wavelengths 52 InGaAs 52 #Gb NAND flash 52 NANOIDENT 52 SMIC #.#um 52 STT RAM 52 FPGA architectures 52 DiCon 52 c Si 52 gallium nitride 52 microelectromechanical systems MEMS 52 Aki Fujimura 52 nm NAND flash 52 wafer metrology 52 sub #nm CMOS 52 reticle enhancement 52 HamaTech APE 52 #mm fabs 52 Evaluation Module 52 Silicon photonics 52 FineSim Pro 52 DDR PHY 52 Indium Phosphide InP 52 interposers 52 GaN HEMTs 52 Novellus SABRE 52 Manz Automation 52 #LP [002] 52 coater developer 52 HKMG technology 52 flexo printing 52 AFMs 52 Insulator SOI 52 Organic Light Emitting 52 HIT Kit 52 planar transistors 52 athermal 52 nanometer microprocessors 52 micromachining 52 chip SoCs 52 TQP# 52 TWINSCAN 52 dielectric materials 52 photodiode arrays 52 MAPPER 52 singulation 52 ion traps 52 moviNAND 52 optical interconnect 52 Nantero 52 nm SOI 52 #Gbit [001] 52 electrodeposition 52 nanoimprint lithography NIL 52 multicore architecture 52 SHELLCASE 52 backside illumination BSI 52 Brion Technologies 52 #GBASE T PHY 52 x ray optics 52 lithographic techniques 52 quantum dot lasers 52 reactive ion 52 nanometrology 52 reconfigurable computing 52 magnetoresistive random access 52 Encounter RTL Compiler 52 TMS#C# DSP 52 active matrix OLEDs 52 Thinfilm 52 carbon nanotube transistors 52 PhlatLight 52 Terahertz 52 oxyfuel combustion 52 Analog FastSPICE 52 numerical aperture NA 52 DDR3 chips 52 DSSCs 52 electrowetting displays 52 nanometer nm CMOS 52 produced plasma LPP 52 pellicle 52 DS UWB 52 SiC 52 #nm CMOS [002] 52 blue laser diode 52 photopolymer 52 PolyJet Matrix TM 52 Ultra Wideband UWB 52 magnetron sputtering 52 projected capacitive touch 52 diode lasers 52 1Gbit DDR2 52 Structured ASICs 52 spintronic devices 52 stereolithography 52 hydride vapor phase 52 fabs 52 atomic spectroscopy 52 copper metallization 52 femtosecond pulse 52 FB DIMM 52 RF MEMS 52 Obducat 52 eWLB technology 52 #nm FPGAs 52 PLED 52 #nm lithography [002] 52 DRIE 52 #.#μm CMOS 52 laser diode 52 nonpolar GaN 52 inkjet printhead 52 microfabrication techniques 52 silicon waveguide 52 Oxide Silicon 52 OLEDs 52 Mask Aligner 52 kit PDK 52 Plasmonic 52 DEK Solar 51 Beamline #.#.# 51 JFET 51 Silicon Hive 51 quantum cascade lasers 51 interposer 51 microfluidic devices 51 SolarWindow TM 51 ArctiCore 51 UVTP 51 HBLED 51 fiber lasers 51 photonic crystal fibers 51 mm fabs 51 Texas Instruments DLP 51 MOS transistors 51 ECPR 51 SoC 51 Quad NROM 51 XFP module 51 electron emitters 51 NexFlash 51 nanobattery 51 MRAM chips 51 #Gbps transceivers 51 antireflective coatings 51 silicon wafers 51 mm silicon wafers 51 e beam DFEB 51 optical microscopy 51 photoluminescence 51 ultra wideband UWB 51 #.#um [001] 51 UniPhier 51 MRAM 51 High Voltage CMOS 51 Raman spectrometer 51 SiC substrates 51 MirrorBit Eclipse 51 lenticular lens 51 Virtuoso Accelerated Parallel Simulator 51 MEMS resonators 51 terahertz imaging 51 Nanoindentation 51 microfluidics 51 SiGe 51 nanometer chips 51 wafer probing 51 photonic integrated circuits 51 wafer bumping 51 nanophotonic 51 #nm processors 51 #/#G Ethernet 51 Xilinx FPGA 51 TOF TOF 51 laser sintering 51 photonic integrated circuits PICs 51 spintronic 51 MirrorBit Quad 51 PowerTheater 51 Luminescent Technologies 51 transistor circuits 51 conductive polymer 51 nitride 51 SiGe bipolar 51 flexible monolithically integrated 51 flexible CIGS 51 nanofabrication 51 TAS# [001] 51 pMOS 51 VIISta 51 pulsed laser deposition 51 OLED lighting 51 laser micromachining 51 #nm laser [002] 51 Lasertec 51 GDDR4 51 Stratix II GX 51 poly silicon 51 Cymer 51 ANTARES 51 CMOS imager 51 tunable filters 51 brightness LED 51 transistor scaling 51 MMICs 51 UV lasers 51 Immersion lithography 51 NSR S#C 51 QMEMS 51 LDMOS 51 CMOS ICs 51 manufacturability 51 Semprius 51 carbon nanotubes CNT 51 SystemC TLM 51 geometries shrink 51 ultrahigh resolution 51 brightfield 51 NOVeA 51 EDXRF 51 organic photovoltaics 51 parasitic extraction 51 microelectronic components 51 density interconnect HDI 51 PNX# 51 photoresist stripping 51 multicore DSPs 51 #mm silicon wafers 51 additive fabrication 51 BrilliantColor TM 51 silicon oscillators 51 StarRC Custom 51 photonic circuits 51 Xenics 51 Nanometer 51 CIGS Copper Indium 51 ferroelectric RAM 51 SoC designs 51 optical metrology 51 ion implanter 51 sapphire wafers 51 RFIC 51 TetraMAX ATPG 51 mm wafer fab 51 ultrashort pulse laser 51 fxP 51 #Gbps Ethernet switch 51 MAX# integrates 51 reflow soldering 51 SiTime 51 CMOS imagers 51 SolarWindow 51 Acreo 51 furnaceware 51 GDSII 51 helium ion 51 TCZ 51 NRAM TM 51 OLED 51 violet laser 51 microdisplay 51 silicon substrates 51 wirebond 51 CameraChip 51 MEMS resonator 51 Holographic Versatile Disc HVD 51 Timbre Technologies 51 Bandwidth Engine 51 edge roughness LER 51 ARM7TDMI processor 51 NanoBridge 51 Marvell #DE# 51 Helios NanoLab 51 ITRS 51 AMOLEDs 51 HTPS panels 51 FineSim 51 ExpEther 51 Amorphous silicon 51 photopolymers 51 #.#ac 50 LTPS TFT 50 wafer fabrication 50 #nm MLC 50 SynTest 50 DDR2 DRAM 50 SWCNT 50 organic TFTs 50 GaN transistors 50 ATDF 50 inkjet printing 50 line BEOL 50 optical transceiver 50 semiconductor metrology 50 FineSim SPICE 50 nanoparticle inks 50 GenISys 50 exascale computing 50 voltage CMOS 50 SUSS 50 purity silicon 50 embedded DRAM 50 ASML immersion 50 SiWare 50 MOCVD 50 mask ROM 50 hyperspectral imager 50 FotoNation FaceTracker 50 DDR3 DRAM 50 8bit MCUs 50 jitter measurement 50 litho 50 mask aligner 50 Calibre DFM 50 Nova NanoSEM 50 Envelope Tracking 50 MALDI-TOF/TOF 50 microelectronic devices 50 Vertical Cavity Surface Emitting 50 laser diode modules 50 UV LEDs 50 reticles 50 RV# GPU 50 microreactors 50 selective soldering 50 photon detection 50 2G HTS wire 50 #G/#G Ethernet 50 photovoltaics PV 50 Quantum Dot 50 Dektak 50 CCD imagers 50 SWIR cameras 50 laser diode module 50 Atrenta SpyGlass 50 IMFT 50 potentiostat 50 microchannel plate 50 SpursEngine 50 Imec performs world 50 SkyTrough 50 scatterometry 50 DPSK 50 GaAs pHEMT 50 semiconductor fabs 50 DEV DA TOMAR NEXT 50 X ray absorption spectroscopy 50 epitaxy HVPE 50 OLED panels 50 MEMS oscillators 50 outcoupling 50 monochromator 50 UV curing 50 ARPES 50 ATopTech 50 THz 50 ion implanters 50 DDR4 50 Structured ASIC 50 silicon photonic 50 UniPixel 50 Epson Toyocom 50 Quartz DRC 50 #.#um [002] 50 Magma Talus 50 Cadmium Telluride CdTe 50 OLEDS 50 thermoelectric materials 50 vibrational spectroscopy 50 nanometer nm NAND flash 50 WirelessHD chipsets 50 nanolaser 50 solar concentrator 50 carbon nanotube CNT 50 ultrawideband 50 GaN LED 50 di selenide CIGS 50 packaging WLP 50 interferometry 50 crystalline Si 50 HyperCloud 50 Carbon nanotube 50 GaN transistor 50 ray tracing 50 CFD simulations 50 OEL panels 50 MEMS fabrication 50 mass spectrometry MS 50 Inkjet printing 50 insulator wafers 50 ion beam 50 Angstron 50 oxynitride 50 SEMATECH 3D 50 conductive coatings 50 nano fabrication 50 SOI substrate 50 Silicon Carbide 50 SED TVs 50 Eudyna 50 ZMD AG 50 SiPs 50 SuperFlash 50 vertical cavity 50 BitWave 50 QLED 50 WiMAX chipset 50 defect densities 50 CRIUS II 50 Remcom 50 synthesizable IP 50 Kilopass XPM 50 ASML 50 iPDK 50 integrated passives 50 Wafer Level Chip 50 TM# [002] 50 #.#u 50 defectivity 50 Strained silicon 50 argon fluoride ArF 50 Aeluros 50 nanocomposite material 50 organic LEDs OLEDs 50 logic CMOS 50 Mindspeed Transcede 50 PZT 50 PDKs 50 prototyping 50 nanomanufacturing 50 chip variation OCV 50 chalcogenide 50 SiliconBlue 50 MB#H# 50 LCoS 50 Affinity Biosensors 50 Vistec Lithography 50 CMOS RF CMOS 50 CIGS solar panels 50 ICODE 50 AMLCD 50 PoE Plus 50 TFT LCD modules 50 MTS# 50 ALLVIA 50 ISMI 50 nanofabrication techniques 50 TetraMAX 50 GaAs HBT 50 ultraviolet lasers 50 MB#R# 50 nanofilm 50 High Brightness LED 50 HfSiON 50 JENOPTIK GmbH 50 Auria Solar 50 quantum dot 50 RFIC simulation 50 chip SOC 50 OptoPHY 50 optical interconnections 50 GaN substrates 50 GDDR5 50 Gallium Arsenide GaAs 50 STB# [002] 50 photonic crystal 50 electro optic polymer 50 Gaussian beam 50 Intel #P chipset [001] 50 Diode OLED 50 protein biochip 50 Maskless 50 transistor 50 STV# 50 transparent conductive 50 Fraunhofer IPMS 50 Stratix IV GX 50 Gennum VXP 50 SRAMs 50 silicon interposers 50 micromechanical 50 thermal cyclers 50 excimer lasers 50 Tetra Reticle Clean 50 silicon etch 50 programmable SoC 50 Freescale UWB 50 Embedded Array 50 TMS#DM# [002] 50 Xpedion 50 TMS#DM# [001] 50 1T FLASH 50 LTE UE 50 GX FPGAs 50 SIGMA C 50 Zenverge 50 nickel silicide 50 GaAs 50 Atmel ATmega#RFA# 50 Suss MicroTec 50 multiprocessor architecture 50 submicron 50 programmable logic 50 temporary wafer bonding 50 CPP GMR 50 Silicon Oxide Nitride 50 ultrashort pulses 50 QWIP 50 #nm #nm [002] 50 WiMAX SoC 50 XG P#X 50 FT IR 50 E pHEMT 50 picosecond laser 50 electro optic modulator 50 chipmaking 50 printable electronics 50 perpendicular magnetic recording 50 SEMICON 50 Ascentis Express 50 NAND Flash memory 50 logic NVM 50 Litho Forum 50 GaN LEDs 50 Airborne Particle Sensor 50 BAW filters 50 SEMICON West 50 flexographic plates 50 #.#μ 50 AlGaAs 50 SiliconSmart 50 K dielectrics 50 transparent electrode 50 5V CMOS 50 autostereoscopic 49 UV flatbed printer 49 diffraction 49 SOI Silicon 49 nanopositioning 49 Ultra wideband 49 TSMC #nm G 49 multilayer ceramic capacitors MLCC 49 UVision 49 4Gb DDR3 49 ARM#EJ S processor 49 B4 Flash 49 ThermaVolt II 49 WLANPlus 49 SecurCore 49 #nm transistors 49 ViSmart viscosity sensor 49 dimensional metrology 49 double patterning lithography 49 InGaN 49 dielectrics 49 MT#V# 49 Micron Boise Idaho 49 tuner IC 49 electron beam 49 epitaxial deposition 49 CMOS transistor 49 eDRAM 49 Beneq 49 Microdisplay 49 UltraCMOS 49 ChemetriQ 49 JEOL 49 #.#um CMOS 49 ADRES 49 ULIS 49 chip SoC designs 49 processless 49 LED backlights 49 extendibility 49 Multicore processors 49 gate dielectrics 49 Sofradir 49 ABT# 49 Isolation Memory Buffer 49 OptiML Focus 49 YieldAssist 49 metallic interconnects 49 OVPD 49 indium phosphide 49 PhlatLight LED 49 absorption spectroscopy 49 HDS# 49 Selete 49 indium phosphide InP 49 Impinj AEON 49 Stratix II 49 Organic Photovoltaics 49 FPOA 49 photocatalysts 49 microdevices 49 #.#.#/ZigBee 49 RedHawk SDL 49 QorIQ platforms 49 Talus RTL 49 nm NAND 49 copper indium gallium selenide