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(Click for frequent words.) 74 EUV 71 EUVL 69 EUV lithography 65 extreme ultraviolet lithography 63 immersion lithography 61 deep ultraviolet DUV 61 extreme ultra violet 61 #nm immersion 60 ArF 60 computational lithography 60 lithography 60 maskless lithography 60 nm immersion 59 EUV mask 59 nm lithography 59 nanoimprint 59 Gigaphoton 58 mask optimization SMO 57 ArF immersion lithography 57 Extreme Ultraviolet EUV 57 EUV resists 57 XT #i 57 #nm immersion lithography 57 nano imprint 57 NuFlare 57 lithography simulation 56 photomasks 56 imprint lithography 56 semiconductor lithography 56 EUV resist 56 e beam lithography 55 EUV Lithography 55 #nm lithography [001] 55 optical lithography 55 epi wafers 55 photolithography 55 nano imprint lithography 55 Lithography 55 CIGSe 55 nanolithography 54 microlithography 54 microbolometers 54 CIGS solar 54 UV LED 54 photomask 54 numerical aperture NA 54 argon fluoride 54 ArF immersion 54 indium gallium arsenide InGaAs 54 CIGS cells 54 CIGS 54 argon fluoride ArF 54 nanoimprint lithography 54 micro optics 54 nanoimprint lithography NIL 54 CMOS fabrication 53 Brion Technologies 53 DUV 53 Extreme Ultra Violet 53 TFPV 53 photomask inspection 53 TWINSCAN XT #i 53 wafer bonder 53 #nm node [001] 53 Immersion Lithography 53 photoresists 53 reticle inspection 53 e beam DFEB 53 Litho Forum 53 immersion litho 53 nm node 53 Energetiq 53 correction OPC 53 AlGaAs 52 EUV masks 52 gallium nitride 52 millimeter wafer 52 XLR #i 52 Photomask 52 silicon photovoltaics 52 Photolithography 52 Raman Spectroscopy 52 terahertz imaging 52 #nm DRAM 52 Aera2 52 SPIE Advanced Lithography 52 Auria Solar 52 Airborne Particle Sensor 52 optical metrology 52 CIGS solar panels 52 Gallium Nitride 52 crystalline Si 52 EUVA 52 EBDW 52 photovoltaics PV 52 maskless 52 photoluminescence 52 #nm RF CMOS 52 monochromators 52 DEK Solar 52 systems substrate bonders 51 GaN HEMT 51 mask aligners 51 2Xnm 51 BrightLase 51 Nanochip 51 Phoseon Technology 51 amorphous silicon 51 X ray microscopy 51 micro machining 51 VUV 51 microelectromechanical systems MEMS 51 Moritex 51 Sematech 51 helium ion 51 poly silicon 51 quantum dot lasers 51 GaN LEDs 51 MiaSole 51 microbolometer 51 Xenics 51 photodetectors 51 #nm CMOS [001] 51 ITRS roadmap 51 #nm fab 51 photovoltaic PV module 51 ASML 51 #/#nm 51 Gallium Nitride GaN 51 deep submicron CMOS 51 copper indium gallium selenide 51 active matrix OLEDs 51 TCZ 50 microfocus X ray 50 #nm SOI 50 transistor circuits 50 Beamline #.#.# 50 X ray detectors 50 QCLs 50 FinFET 50 3D TSV 50 inkjet printhead 50 PROLITH 50 UV NIL 50 amorphous silicon Si 50 CIGS solar cell 50 SOI CMOS 50 CIGS PV 50 Crolles2 Alliance 50 GenISys 50 optical spectroscopy 50 photopolymer 50 ASML EUV 50 CIGS solar cells 50 nm CMOS 50 carbon nanotube CNT 50 Molecular Imprints 50 laser scribing 50 ion beam 50 consortium Sematech 50 darkfield 50 semiconductor metrology 50 CMOS MEMS 50 nanometer microprocessors 50 Complementary Metal Oxide Semiconductor 50 Dektak 50 Cymer 50 DSSCs 50 electron beam lithography 50 silicon photovoltaic PV 50 TWINSCAN 50 silicon MEMS 50 cadmium telluride CdTe 50 Aerosol Jet 50 IR spectroscopy 50 Solibro 50 #nm nodes 50 nanometer silicon 50 C4NP 50 IEDM 50 silicon wafer 50 multijunction solar cells 50 EDXRF 50 sapphire wafers 50 Inkjet printing 50 photolithographic 50 MALDI 50 backside illumination 50 FT IR 50 numerical aperture 50 #nm/#nm 50 epitaxy HVPE 49 Manz Automation 49 shearography 49 projected capacitive touch 49 .# micron 49 reflectometry 49 reflectometer 49 wafer thinning 49 Silicon Germanium 49 CIS CIGS 49 JEOL 49 photoresist 49 oxide semiconductor 49 SUSS MicroTec 49 nanometer node 49 #nm silicon 49 Tachyon OPC + 49 nanosilicon 49 sapphire substrate 49 CMP consumables 49 Gallium Arsenide GaAs 49 nm SOI 49 millimeter silicon wafers 49 #nm Buried Wordline 49 ASML TWINSCAN 49 silicon germanium SiGe 49 furnaceware 49 International Sematech 49 Plasmonic 49 lithographic processes 49 FE SEM 49 Sulfurcell 49 high-k/metal-gate 49 high-k/metal gate 49 synchrotron X ray 49 dimensional metrology 49 micromorph 49 nano patterning 49 nm CMOS process 49 Grätzel cells 49 Richard Brilla CNSE 49 SOI wafers 49 nm immersion lithography 49 Rapid prototyping 49 DFEB 49 MiaSolé 49 BEOL 49 overlay metrology 49 planar lightwave circuits 49 Aixtron MOCVD 49 epiwafers 49 vibrational spectroscopy 49 Silicon Photonics 49 indium gallium nitride InGaN 49 cadmium telluride 49 Nanosolar 49 MEMS oscillator 49 k dielectrics 49 spectroradiometers 49 TSMC #nm process 49 #nm laser [002] 49 nitride semiconductor 49 quantum cascade 49 OSTAR ® 49 OneChip 48 Nasdaq VECO 48 OEL panels 48 nanopatterning 48 solar photovoltaic PV modules 48 UV Visible 48 Fraunhofer IPMS 48 GaN HEMTs 48 monolithic microwave integrated 48 conductive coatings 48 wide bandgap semiconductors 48 Remcom 48 Indium Phosphide 48 organic electroluminescent 48 ZMD AG 48 #.# micron node 48 #nm chips 48 microelectronic components 48 nanometrology 48 #mm wafer 48 semiconductor fabs 48 deep silicon etch 48 nm nodes 48 Miasole 48 Raman spectrometer 48 RRAM 48 X ray diffractometer 48 precision metrology 48 indium tin oxide ITO 48 iTi Solar 48 DPSS lasers 48 CdTe PV 48 photomultipliers 48 Double Patterning 48 nanophotonic 48 UMG silicon 48 linearly polarized 48 silicon 48 silicon wafers 48 vapor deposition 48 Gallium Arsenide 48 electromagnetic simulation 48 Crolles2 48 organic TFTs 48 SEMATECH 48 OTES 48 OLED displays 48 scanning electron microscope SEM 48 #nm [002] 48 ASML immersion 48 Esatto Technology 48 backside illumination BSI 48 LTPS TFT 48 CMOS oscillators 48 CIGS panels 48 plasma etch 48 ASML Holding NV ASML 48 silicon foundries 48 lithographic 48 glass substrate 48 Aixtron 48 laser diode modules 48 MEMS microelectromechanical systems 48 brightfield 48 poly Si 48 Avancis 48 CMOS photonics 48 capacitive touch panels 48 ultrahigh resolution 48 Clear Shape 48 MaxEdge 48 electron optics 48 ALLVIA 48 Heliovolt 48 ultrafast laser 48 Gallium nitride 48 ArF dry 48 photonic devices 48 fluorescence spectroscopy 48 copper indium gallium diselenide 48 dye sensitized 48 wafer probing 48 Applied Materials Inc 48 Novalux 48 xenon lamp 48 optical waveguides 48 transparent conductive 48 planar waveguide 48 #nm fabrication 48 mm wafer 48 Vistec Lithography 48 SunFab thin film 48 CIGS modules 48 CRIUS II 48 reticle enhancement 48 pellicle 48 Copper Indium Gallium Selenide 48 Sofradir 48 inkjet printing 48 UV LEDs 48 CIGS photovoltaic PV 48 CIGS thin film 48 MIRAI 48 silicon wafer maker 48 ULIS 48 Teradyne FLEX 48 semiconductor optoelectronics 48 deconvolution 48 ownership CoO 48 aluminum nitride 48 InGaAs 48 film transistor TFT 48 phototransistors 48 3Xnm 48 EVG# 48 Ulvac 48 VCSELs 48 GaN 48 MOEMS 47 ECPR 47 temperature poly silicon 47 reticles 47 antireflective coatings 47 micromachining 47 crystalline silicon c 47 mm wafers 47 linewidths 47 Michal Lipson 47 Affinity Biosensors 47 B4 Flash 47 Extreme Ultraviolet 47 Microdisplay 47 SiC substrates 47 Silicon CMOS Photonics 47 UMC #nm 47 design kits PDKs 47 Zecotek MAPD 47 CRIUS 47 F3D 47 Access Memory MRAM 47 di selenide CIGS 47 NSR S#C 47 lensless imaging 47 k gate dielectrics 47 femtosecond pulse 47 ASML lithography 47 NMR spectrometers 47 scatterometry 47 Luminescent Technologies 47 PeakView 47 additive fabrication 47 #.#μm [002] 47 mmWave 47 Optomec Aerosol Jet 47 magnetron sputtering 47 metrology 47 TetraMAX ATPG 47 #nm ArF 47 SOI wafer 47 silicon photonics 47 PANalytical 47 AlGaInP 47 hydride vapor phase 47 AFMs 47 Calibre LFD 47 active matrix OLED 47 ChemetriQ 47 bioimaging 47 3D graphics accelerators 47 #nm #nm [005] 47 shorter wavelengths 47 silicon PV modules 47 HVPE 47 superlens 47 virtual prototyping 47 Opti Probe 47 monolithically integrated 47 coater developer 47 nm 47 #mm fab 47 Altatech 47 NIRCam 47 HBLED 47 nanoimprinting 47 III nitride 47 PSI TEC 47 DFM DFY 47 gallium nitride GaN 47 molecular spectroscopy 47 insulator wafers 47 PolyJet Matrix TM 47 reactive ion 47 Alanod Solar 47 #nm wavelength [001] 47 CyberDisplay #K 47 k dielectric 47 GaN substrates 47 pulsed laser deposition 47 oxynitride 47 Sofradir EC 47 UV lasers 47 OVPD 47 Chipbond 47 fiber lasers 47 semiconductor 47 MAPPER 47 chipmaking 47 photoresist strip 47 Angstron 47 Selete 47 UV VIS 47 Co2 laser 47 CIGS solar modules 47 optical microscopy 47 FinFETs 47 Lasertec 47 PolyMax 47 #nm HKMG 47 #nm photomask 47 Credence Systems Corp. 47 atomic spectroscopy 47 Beneq 47 Nova NanoSEM 47 GaN wafer 47 silicon ingot 47 EMCCD 47 photovoltaic module 47 #mm silicon wafers 47 wide bandgap 47 SuperArray 47 irreversible electroporation IRE 47 micromirror 47 interferometry 47 Kenmos 47 Imprio 47 MBPV 47 Cray X1 47 selective emitter 47 Suss MicroTec 47 detector arrays 47 antimonide 47 brightness LED 47 SiTime 47 SMT placement 47 FDSOI 47 Aviza Technology 47 SiON 47 nanoscale patterning 47 amorphous silicon TFT 47 2G HTS wire 47 edge roughness LER 47 wafer bonding 47 micromechanics 47 Maskless 47 picosecond lasers 47 nm NAND flash 47 microfabrication techniques 47 Initiative ISMI 47 Aixtron AG 47 airborne lidar 47 DiCon 47 indium phosphide 47 Epson Toyocom 47 absorption spectroscopy 47 Powerful debug 47 Aprio Technologies Inc. 46 microchannel plate 46 ReRAM 46 OLEDS 46 Applied Material 46 nm NAND 46 #.# micron CMOS 46 Tachyon SMO 46 flexo printing 46 LCOS 46 ISFOC 46 gallium selenide 46 laser optics 46 Virtuoso IC 46 microdisplay 46 LayTec 46 LED backlights 46 TDK EPC 46 BiCMOS 46 indium phosphide InP 46 manganite 46 Flexfet 46 Obducat 46 tunable laser 46 Imec performs world 46 Semiconductors ITRS 46 Lean Etch 46 Silicon wafer 46 Interferometric 46 SiGen 46 multiwavelength 46 spectral imaging 46 Silicon carbide 46 die bonder 46 layer deposition ALD 46 microelectromechanical system 46 backside metallization 46 inkjet inks 46 organic photovoltaics 46 purity silicon 46 carbon nanotubes CNT 46 epitaxy 46 Santur Corporation 46 silicon photonic 46 carbon nanotube transistors 46 Cadmium Telluride 46 nonvolatile static random 46 #nm node [002] 46 Photonic crystals 46 diameter wafers 46 PolyIC 46 TeraView 46 #nm NAND Flash 46 Picogiga 46 DEV DA TOMAR NEXT 46 #nm [001] 46 FineSim Pro 46 Santur 46 UV2A 46 HfSiON 46 deep sub micron 46 electrodeposition 46 terrestrial concentrator 46 QuantumFilm 46 electroluminescence 46 nanometer 46 metallic interconnects 46 OLED 46 photon detection 46 DongbuAnam 46 mass spectrometry MS 46 Tetra Reticle Clean 46 opto electrical 46 Mask Aligner 46 solder bump 46 SpecMetrix 46 Displaytech 46 emission wavelength 46 nm DRAM 46 LCoS 46 Vertical Cavity Surface Emitting 46 dielectric etch 46 nanostructured silicon 46 TWINSCAN NXT 46 AIX #G# 46 monochromator 46 OptoPHY 46 Inovys 46 Innolume 46 crystalline silicon photovoltaic 46 mask aligner 46 MEMS oscillators 46 violet laser 46 SensL 46 mask ROM 46 silicon germanium 46 Fraunhofer ISE 46 photodetector 46 microelectronic packaging 46 Thin Film Solar 46 SIMOX 46 #nm CMOS [002] 46 solar concentrator 46 transparent electrode 46 DDR3 chips 46 electron beam 46 ZnS 46 Copper Indium Gallium 46 Spintronics 46 Helioseismic 46 PHOLED 46 HEMTs 46 FEOL 46 metallization 46 spintronic 46 interferometric 46 Spectrometers 46 UV flatbed printer 46 Atul Sharan 46 nanopositioning 46 tunable lasers 46 Silicon Carbide 46 bipolar transistors 46 HORIBA Jobin Yvon 46 Micromorph ® 46 Thin Film Line 46 ContourGT 46 epitaxial deposition 46 HiPER 46 #mm wafers 46 SII NanoTechnology 46 HKMG 46 Intermolecular 46 nm geometries 46 indium gallium arsenide 46 GaAs HBT 46 low k dielectrics 46 Fraunhofer IZM 46 CIGS copper indium 46 PLED 46 TWINSCAN XT 46 inkjet printing systems 46 biodetection 46 tunable filters 46 manufacturability DFM 46 ErSol 46 Macronix 46 TSMC #nm [001] 46 Invarium 46 focused ion beam 46 HSPICE R 46 Helios NanoLab 46 nanophotonics 46 antireflective coating 46 DPSS laser 46 photonic crystal fibers 46 ionization mass spectrometry 46 kit PDK 46 solariX 46 BridgeLux 46 Micromorph 46 JEOL Ltd. 46 Tokyo Electron Limited 46 multiprocessor architecture 46 ISRA VISION 46 Programmable logic 46 VHESC 46 silicon etch 46 CIGS Copper Indium 46 pulsed lasers 46 photoemission 46 CMOS scaling 46 Cadmium Telluride CdTe 46 SemiLEDs 45 SiC 45 micromachined 45 electromagnetic flowmeter 45 D1X 45 produced plasma LPP 45 Thin Film Transistor 45 CNT FED 45 lithographic techniques 45 Nanoindentation 45 Osram Opto Semiconductors 45 TestKompress 45 IMEC Leuven Belgium 45 Texas Instruments TI 45 ion traps 45 CamSemi 45 multijunction 45 semiconductor wafer 45 Borexino 45 antireflection 45 Micron Boise Idaho 45 SWIR cameras 45 Terahertz 45 Kovio 45 DCG Systems 45 SOI Silicon 45 SynTest 45 high voltage BCDMOS 45 RPTVs 45 TMOS display 45 RV# GPU 45 #nm MirrorBit 45 crystalline PV modules 45 Elpida #nm 45 OLED microdisplay 45 NXT #i 45 Cree GaN 45 CdTe 45 TLA# Series 45 LTPS LCD 45 spectroscopic methods 45 GaAs MMIC 45 BCDMOS 45 Eudyna 45 wafer metrology 45 Helium Ion Microscope 45 amorphous silicon thin 45 NPFLEX 45 Flex OneNAND 45 ultraviolet laser 45 sSOI 45 PMOLED 45 adaptive optics AO 45 Negevtech 45 correlative microscopy 45 Lextar 45 lithographers 45 Semicon 45 Dresden fab 45 uncooled infrared 45 multicrystalline silicon 45 energy dispersive x 45 semiconductor fabrication 45 Atomic Layer Deposition 45 ReVera 45 laser micromachining 45 smaller geometries 45 chemically amplified 45 silicon interposers 45 Luxtera 45 laser diodes 45 LDMOS RF power 45 SiGe BiCMOS 45 SOI substrates 45 structured ASICs 45 CMOS silicon 45 piezo ceramic 45 transparent conductive coatings 45 beamline 45 innovative Buried Wordline 45 FD SOI 45 PenTile 45 #.#μm CMOS process 45 NANOIDENT 45 RFCMOS 45 Novellus SABRE 45 solder bumping 45 nanoantenna 45 QMEMS 45 OLED TVs 45 Docea Power 45 Nvidia Fermi 45 brightness light emitting 45 Polycrystalline 45 silicon oscillators 45 Applied Materials Inc AMAT.O 45 Insulator SOI 45 TSVs 45 LTPS 45 X Ray Diffraction 45 Silicon Compiler 45 backlight module 45 KLA Tencor NASDAQ KLAC 45 crystalline silicon solar panels 45 temporary wafer bonding 45 inertial sensor 45 Austriamicrosystems 45 Fourier transform infrared 45 Optware 45 SpectraWatt 45 Schmergel 45 lm W 45 transistor arrays 45 XFEL 45 germanium substrates 45 broadly tunable 45 Veeco Instruments 45 ion implantation 45 #mm MEMS 45 PECVD 45 microspectroscopy 45 CdTe solar 45 c Si 45 vertical cavity 45 hermetic packaging 45 nanoparticle inks 45 near infrared NIR 45 solar cells 45 Extech Instruments 45 CMOS sensors 45 x ray imaging 45 nanocrystalline silicon 45 CdSe 45 FTIR spectroscopy 45 CN Probes 45 AMOLEDs 45 solar PV module 45 x ray optics 45 terahertz 45 SensArray 45 High Concentration Photovoltaic 45 film photovoltaic TFPV 45 CFD modeling 45 DDR PHY 45 8G LCD 45 cytometry 45 monocrystalline silicon 45 metallisation 45 Tera Probe 45 epiwafer 45 MeshNetics 45 MEMS fabrication 45 Kurt Ronse 45 ion microscope 45 nanometer lithography 45 defect densities 45 EMCCD camera 45 TECHSPEC ® 45 manufacturable 45 finFETs 45 colorimetry 45 MALDI-TOF/TOF 45 solar photovoltaic modules 45 Scanning Probe 45 microdevices 45 holistic lithography 45 Gb DDR3 45 Ion Trap 45 Lambda Physik 45 nanoscale characterization 45 XDR DRAM 45 XsunX 45 ActiPix 45 optical biosensor 45 MAX# integrates 45 wafer lithography 45 HTPS panels 45 #nm microprocessors 45 String Ribbon solar 45 gate dielectrics 45 HamaTech 45 Imago Scientific Instruments 45 opto mechanical 45 electro optic modulator 45 passive matrix OLEDs 45 conductive inks 45 semiconductor wafers 45 Serial Analyzer 45 CyberOptics 45 Calyxo 45 double patterning lithography 45 dielectrics 45 gas chromatographs 45 graphene transistors 45 Structured ASICs 45 Quad NROM 45 hyperspectral imager 45 Timbre Technologies 45 EBSD 45 Cortex M0 processor 45 chipmakers 45 EcoRAM 45 Credence Systems 45 ATopTech 45 Phison 45 fxP 45 Novellus Systems Inc NVLS.O 45 tunable RF 45 GaAs wafers 45 photovoltaic PV solar panels 45 Uncooled 45 InP 45 QD Laser 45 mm wafer fab 45 multichip 45 laser diode 44 indium gallium phosphide 44 perpendicular recording 44 Omron Corp 44 deep submicron 44 solar photovoltaic cells 44 solution processible 44 FT NIR 44 silane gas 44 inorganic LEDs 44 DSDP 44 Scanning Probe Microscopes 44 CMOS compatible 44 monocrystalline silicon wafers 44 k gate dielectric 44 copper electroplating 44 UVTP 44 #LP [002] 44 planar transistors 44 SiGe bipolar 44 Vistec Semiconductor Systems 44 UV inkjet 44 SUSS 44 hafnium 44 Spintronic 44 Skyray XRF 44 photodiode 44 x ray fluorescence 44 lithium titanate 44 quartz oscillators 44 conformal 44 String Ribbon 44 DRIE 44 electrowetting displays 44 optoelectronic packaging 44 InGaN 44 nanocircuits 44 CIGS photovoltaic 44 Magma Talus 44 Silicon Hive 44 nonpolar GaN 44 AMLCD 44 Synopsys TCAD 44 planar 44 k dielectric materials 44 evanescent wave 44 TSMC Hsinchu Taiwan 44 nanofilms 44 MRAMs 44 spectroscopic 44 Kotura 44 AlN 44 microinverters 44 NanoGaN 44 Nuvoton 44 silicon photomultiplier 44 SAE Magnetics 44 copper metallization 44 Photonic Crystals 44 mm silicon wafers 44 Soitec produces 44 eBeam Initiative 44 Ferrotec 44 spectrometers 44 triple quadrupole 44 Picolight 44 Optoelectronic 44 cmos 44 CMOS 44 Therma Wave 44 Vistec Electron Beam 44 frequency combs 44 TSMC #nm G 44 nanometer wavelength 44 ferrite materials 44 copper indium gallium 44 Ormecon 44 Helios XP 44 ion implant 44 FWB SMH GER SMH 44 #mm wafer fabrication 44 RFIC simulation 44 Silicon Clocks 44 CMOS imager 44 millisecond annealing 44 stylus profilers 44 electro optic polymer 44 epitaxial graphene 44 Applied Materials AMAT 44 LCD steppers 44 ultrasonics