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(Click for frequent words.) 74 gate dielectric 74 dielectric layer 73 dielectric layers 72 pMOS 72 SiO 2 72 k dielectric 71 oxide layer 71 nMOS 71 Si substrate 71 AlN layer 71 silicide 70 gate dielectrics 70 dopant 70 hafnium oxide 70 MOS transistors 70 dielectrics 70 bandgap 69 graphene layers 69 parasitic capacitance 69 dielectric materials 69 silicon substrate 69 MOS transistor 69 dielectric 68 ferromagnet 68 heterostructure 68 tin oxide 68 pn junction 68 silicon waveguide 68 bilayer 68 nickel silicide 67 CMOS transistors 67 eutectic 67 manganite 67 HfSiON 67 microcavities 67 tensile stress 67 substrate 67 FinFET 67 dielectric constant 67 silicon Si 67 Schottky barrier 67 microcavity 67 threshold voltages 67 NMOS 67 PMOS transistors 67 oxide thickness 67 compressive stress 67 epitaxial layer 67 optical waveguide 67 electrically insulating 66 silicon oxide 66 superlattice 66 PZT 66 heterojunction 66 bilayer graphene 66 GaN layer 66 insulating substrate 66 resistive element 66 photonic crystal 66 ferromagnetic 66 crystallinity 66 lanthanum aluminate 66 strontium titanate 66 insulator substrate 66 polymer matrix 66 nanowire 66 YBCO 65 dopants 65 k dielectrics 65 supercurrent 65 AlGaN 65 valence band 65 optical waveguides 65 NiSi 65 GaN transistor 65 pentacene 65 Cu interconnects 65 aluminum nitride 65 AlGaN GaN 65 permittivity 65 nitride layer 65 nonconducting 65 antiferromagnetic 64 copper interconnects 64 HEMT 64 CMOS circuits 64 nanocrystal 64 k gate dielectric 64 ferroelectric 64 Josephson junctions 64 transistor 64 coercivity 64 FinFETs 64 silicon substrates 64 nanocrystalline 64 capacitive coupling 64 mosfet 64 nitride 64 ferrite core 64 passivation layer 64 electrode 64 #μm [002] 64 waveguides 64 PEDOT PSS 64 uniaxial 64 subwavelength 64 bipolar transistor 64 diffraction grating 64 waveguide 63 solder bumps 63 tensile strain 63 InAs 63 electrical conductance 63 silicate glass 63 electron transistor 63 yttrium barium copper 63 electrochemically 63 ZnO nanowires 63 K dielectrics 63 1μm 63 ZnO 63 nanopillars 63 exciton 63 gallium indium arsenide 63 silicon oxynitride 63 undoped 63 nanomesh 63 silicon dioxide 63 nanobelts 63 polymer substrate 63 phototransistor 63 lattice mismatch 63 semiconducting material 63 nonmagnetic 63 dipole moment 63 low k dielectric 63 SiO2 63 silicon nitride 63 DMOS 63 ferrite 63 nanorod 63 self assembled monolayer 63 semiconductive 63 TiN 63 LiNbO3 63 parasitic capacitances 63 semiconducting 63 nanometric 63 cadmium sulfide 63 bistability 63 Bragg grating 62 compressive stresses 62 k gate dielectrics 62 semiconductor nanowires 62 ohmic 62 Schottky 62 Josephson junction 62 photodiode 62 5μm 62 compressive strain 62 leakage currents 62 AlN 62 mesoporous 62 voltage divider 62 planarization 62 indium tin oxide ITO 62 heterostructures 62 thermally activated 62 stripline 62 perovskite 62 thermal conduction 62 photocurrent 62 electron tunneling 62 silicon atoms 62 monolithic CMOS 62 indium arsenide 62 polariton 62 chalcogenide 62 resonator 62 electrodeposition 62 zener diode 62 photoresist 62 silica spheres 62 nanoporous 62 SOI CMOS 62 SiON 62 plasmon 62 electron mobility 62 dual damascene 62 anode 62 zirconium oxide 62 conductance 62 polaritons 62 #nm immersion lithography 62 Mott insulator 62 liquid electrolyte 62 photodetector 62 resonant cavity 62 nanochannel 62 organic TFTs 62 magnetic permeability 62 intermolecular 62 downconverter 62 phosphorus atom 62 anodic 62 ZnSe 62 varactors 62 sapphire substrate 62 vibrational modes 62 ferromagnetism 61 intramolecular 61 CMOS compatible 61 zener diodes 61 photonic bandgap 61 nucleation layer 61 epitaxy 61 QDs 61 electronic excitations 61 toroid 61 lattice vibrations 61 electron spins 61 crystal lattices 61 magnetization 61 nanoribbon 61 resonators 61 Gallium arsenide 61 magnetisation 61 capacitances 61 electrostatic attraction 61 oxynitride 61 piezoelectric crystal 61 ferromagnetic materials 61 SOI silicon 61 cobalt atoms 61 insulating layer 61 HEMTs 61 Arsenide 61 carbene 61 AlGaAs 61 silicon nanowire 61 covalent bond 61 varistor 61 ultrasonic vibrations 61 Mosfet 61 elastic deformation 61 titanium nitride 61 cementite 61 PEDOT 61 gallium phosphide 61 martensite 61 elastic modulus 61 interparticle 61 phototransistors 61 metallization 61 interfacial 61 intermetallic 61 lamella 61 #.#um [001] 61 Insulator SOI 61 conductive polymer 61 capacitance 61 μm diameter 61 antimonide 61 polymerisation 61 quantum capacitance 61 micrometer scale 61 bandgaps 61 silicon 61 HTS wires 61 monolayer 61 CdS 61 breakdown voltages 61 magnetization reversal 61 nanotube 61 metallic nanostructures 61 inhomogeneity 61 resonant tunneling 61 ohmic contacts 61 heavy fermion 61 polyaniline 60 multilayers 60 transparent electrode 60 electron scattering 60 biaxial 60 epitaxial layers 60 submicron 60 graphite oxide 60 PIN diode 60 optically coupled 60 anneal 60 epitaxially 60 insulator wafers 60 interfacial layer 60 MWNT 60 SWCNT 60 barium titanate 60 polydimethylsiloxane 60 metallisation 60 block copolymer 60 cadmium selenide 60 paramagnetic 60 sulfur atom 60 colloidal crystals 60 μm thick 60 nanodots 60 capacitor 60 graphene transistors 60 ferroelectricity 60 indium phosphide 60 copper metallization 60 nanotube arrays 60 conduction electrons 60 calcium fluoride 60 conductive coating 60 ZnS 60 cuprate 60 silicon waveguides 60 FeRAM 60 MgO 60 ceramic capacitor 60 oxide semiconductor 60 piezoelectric actuator 60 palladium Pd 60 atomic lattice 60 transistor pHEMT 60 titania 60 gold nanoclusters 60 electromigration 60 nitride semiconductor 60 terahertz radiation 60 orbitals 60 redox reactions 60 InSb 60 zinc selenide 60 microstructures 60 ferroelectrics 60 PIN diodes 60 bistable 60 nanochannels 60 4H SiC 60 extrudate 60 magnetostrictive 60 zinc oxide nanowires 60 concentration gradient 60 conductive epoxy 60 pn junctions 60 impedances 60 microcrystalline silicon 60 epoxide 60 photoemission 60 Schottky diode 60 silicon germanium 60 zirconium nitride 60 passivated 60 poly Si 60 hyperfine 59 aluminum oxide 59 BEOL 59 indium gallium 59 photodetectors 59 #.# micron node 59 low k dielectrics 59 nanoribbons 59 hexamers 59 Strained silicon 59 SOI substrates 59 passivation 59 silicon germanium SiGe 59 topological insulator 59 antireflective coatings 59 CdSe 59 electroless plating 59 gallium indium phosphide 59 optically transparent 59 superconducting qubit 59 graphene transistor 59 photoconductive 59 bismuth telluride 59 dewetting 59 doped silicon 59 planarity 59 electrochemical reaction 59 HfO2 59 diode 59 indium gallium phosphide InGaP 59 catalytic reactions 59 absorption spectroscopy 59 carbon nanotube CNT 59 martensitic 59 transconductance 59 underfill 59 nanometer silicon 59 quantum dot 59 microfabricated 59 thermally stable 59 gate transistors 59 polymer membrane 59 nanofilm 59 ceria 59 nanoelectromechanical 59 JFET 59 NWs 59 quasiparticle 59 atomically thin 59 wafer thickness 59 silicon photonic 59 conductivities 59 birefringence 59 thermoplastic polyester 59 MESFET 59 thermal impedance 59 multiferroic 59 tetragonal 59 QMEMS 59 thermal decomposition 59 thyristor 59 graphene sheets 59 antiparallel 59 CMOS logic 59 APTIV film 59 sulfur atoms 59 Field Effect Transistor 59 piezoelectric ceramic 59 PWM signal 59 annealing temperature 59 microcrystalline 59 frictional heating 59 anions 59 THz radiation 59 nanocrystals 59 bimetal 59 FETs 59 magnetic dipole 59 gelation 59 titanium carbide 59 planar 59 lipid membranes 59 palladium nanoparticles 59 electron pairs 59 graphene sheet 59 monolayer graphene 59 indium gallium arsenide 59 hafnium 59 nanomembranes 59 through silicon vias 59 micro machined 59 #.#μm [001] 59 inductor 59 germanium silicon 59 pore sizes 59 indium phosphide InP 59 dispersive 59 crystallites 59 HKMG 59 resonance frequency 59 polarized electrons 59 transparent conductive 59 electron doped 59 carbides 59 metastable 59 MWNTs 59 micromachined 59 conductivity 58 nanocomposite material 58 quasiparticles 58 C0G 58 Si SiGe 58 Complementary Metal Oxide Semiconductor 58 eutectic solder 58 #nm CMOS [002] 58 polydimethylsiloxane PDMS 58 #.#μm CMOS 58 #nC 58 pearlite 58 germanium 58 transistor leakage 58 microchannel 58 CMOS circuitry 58 longitudinal axis 58 Fig. 4b 58 transimpedance amplifier 58 graphene nanoribbons 58 GaAs substrate 58 hydride 58 micromirror 58 antiferromagnets 58 capacitively coupled 58 silicon interposer 58 MLCCs 58 tin Sn 58 magnetoresistance 58 vesicle fusion 58 meV 58 piezoelectric 58 anisotropic 58 GPa 58 RRAM 58 epoxy matrix 58 parasitic inductance 58 superlens 58 monolithically integrated 58 cathode 58 polymer nanofibers 58 molecules adsorbed 58 dye molecules 58 micelle 58 vias 58 nanostructure 58 Silicon Germanium 58 erbium 58 BiFET 58 indium tin oxide 58 sulfonated 58 optocoupler 58 linewidth 58 Epitaxial 58 surface plasmon 58 donor acceptor 58 #nm silicon 58 microfluidic channels 58 nanoscopic 58 piezo actuators 58 photoluminescence 58 solder bumping 58 selenide 58 FDSOI 58 electrically conducting 58 cm -1 58 glass frit 58 metal oxide 58 solvent evaporation 58 microstructured 58 microchannels 58 toroidal 58 InGaP 58 ultrananocrystalline diamond 58 VCSEL 58 Mg Fe 58 lipid bilayer 58 MOSFETS 58 refractive index 58 MAX# integrates 58 dipolar 58 electrophoretic 58 Mosfets 58 titanate 58 nanocrystalline silicon 58 5V CMOS 58 nanomagnets 58 alkene 58 ultraviolet lasers 58 demultiplexer 58 silicon nanocrystals 58 external resistor 58 resistor capacitor 58 passivating 58 InGaAs 58 semiconductor nanocrystals 58 #um [002] 58 intergranular 58 bismuth ferrite 58 rectifier diode 58 membrane pores 58 transparent conductive coatings 58 leadframes 58 cantilever deflection 58 indium gallium phosphide 58 CMOS silicon 58 Auger recombination 58 GaN layers 58 gallium indium 58 superparamagnetic 58 microlens 58 avalanche photodiode 58 eutectic alloy 58 graphene 58 dielectric etch 58 Si substrates 58 walled carbon nanotube 58 atomically smooth 58 MEMS resonators 58 polycrystalline 58 Vdd 58 SiC substrates 58 mm ² 58 nanometer scale 58 diffraction pattern 58 GaN HEMT 58 GaN HEMTs 58 intermetallic compounds 58 dipole antenna 58 photonic crystal waveguide 58 zinc ions 58 valence electrons 58 TFTs 58 electromagnetically 58 Fig. 1c 58 SiGe bipolar 58 carbon nanotube transistor 58 alkynes 58 Brillouin zone 58 multilayer ceramic 58 photolithographic 58 coupling capacitors 58 iron carbide 58 manganese atoms 58 switched capacitor 58 polymer 58 excitons 58 #.#μm CMOS process 58 semiconducting properties 58 collagen fibrils 58 #μm [001] 58 leakage inductance 57 electrochemical 57 laterally diffused metal 57 colloidal quantum dots 57 antireflection 57 indium gallium nitride InGaN 57 phonon 57 nanowire arrays 57 polymer membranes 57 thermal conductivities 57 demagnetization 57 BJTs 57 magnesium ion 57 interdigitated 57 heterojunctions 57 boron nitride 57 TiO 2 57 microstrip 57 manganese oxide 57 Indium Phosphide 57 micrometer thick 57 ultrathin layer 57 aluminum fins 57 colloidal particles 57 semiconducting nanowires 57 anomalous dispersion 57 unreacted 57 MWCNT 57 ceramic substrate 57 polymeric 57 photon absorption 57 electron density 57 thermal gradients 57 azobenzene 57 steric 57 #.#V CMOS 57 electrostatic interactions 57 capacitive sensor 57 rubidium vapor 57 pyroelectric 57 InGaN 57 phonons 57 electrochemical reactions 57 2nm 57 monolayers 57 #nm #nm [002] 57 X7R 57 Lithium ions 57 thermal conductance 57 ferromagnets 57 nanofabricated 57 surface passivation 57 optically pumped 57 high-k/metal gate 57 x ray absorption spectroscopy 57 cm ² 57 nanomotor 57 cermet 57 surface roughness 57 oxide thickness EOT 57 piezoresistive 57 austenitic stainless steel 57 photonic devices 57 polyimide 57 conductive 57 metallic ions 57 ferro electric 57 bypass capacitor 57 excitonic 57 laser resonator 57 thermally induced 57 cathodic 57 FUSI 57 actin filament 57 photocatalysts 57 JFETs 57 metallic nanotubes 57 GaAs MESFET 57 superconducting cables 57 film transistors TFTs 57 defect densities 57 radiative recombination 57 semiconducting materials 57 dc voltage 57 crystal lattice 57 SiC 57 plasma etching 57 GaAs pHEMT 57 k dielectric materials 57 argon fluoride 57 differential scanning calorimetry 57 wafer dicing 57 PHEMT 57 titanium oxide 57 integrated passives 57 quantum superpositions 57 nanospheres 57 silica substrate 57 #.#μ 57 GaP 57 piezoelectric properties 57 oxide 57 hydroxide ions 57 anode cathode 57 conjugated polymers 57 nanocluster 57 nanostructuring 57 light emitting transistor 57 rotary valve 57 post perovskite 57 nonlinear optical 57 linewidths 57 sinusoidal 57 gallium selenide 57 2μm 57 thermal conductivity 57 cobalt atom 57 channel MOSFET 57 self assembled monolayers 57 photomultiplier 57 #.# micron CMOS 57 weldability 57 electrically isolated 57 recrystallization 57 motor windings 57 carbon nanotube arrays 57 TDK EPC 57 polybutadiene 57 nanocages 57 layer graphene 57 electrical resistivity 57 polymeric membrane 57 polytetrafluoroethylene PTFE 57 lithographic processes 57 variable resistor 57 ZrO 2 57 crossflow 57 #um [001] 57 CNTs 57 platinum Pt 57 Ruthenium 57 gallium arsenide 57 ZnO nanowire 57 epi wafers 57 anionic 57 diffracted 57 thermal dissipation 57 gasketing 57 aluminum nitride AlN 57 MWCNTs 57 Fig. 1a 57 erbium doped fiber 57 chromophore 57 indium gallium arsenide InGaAs 57 airgap 57 oscillation frequency 57 isotropic 57 chalcogenide glass 57 #nm nodes 57 thermo mechanical 57 dihydrogen 57 reactive ion 56 SiC Schottky diodes 56 electrically conductive 56 photon energies 56 barium ferrite 56 nitrided 56 ACPL K# 56 inductances 56 nanoparticle arrays 56 nanoholes 56 surface plasmons 56 SiGe C 56 terahertz frequencies 56 epitaxial silicon 56 modulus 56 linearly polarized 56 Schottky diodes 56 ultrasonic vibration 56 superconducting 56 temperature coefficient 56 overmolding 56 CMOS oscillators 56 porous silicon 56 microwave photon 56 metal gate HKMG 56 gold nanocluster 56 dimer 56 microfluidic chips 56 bandpass filter 56 electrons emitted 56 phonon scattering 56 Fabry Perot 56 intercalation 56 SOI substrate 56 tantalum capacitors 56 thyristors 56 microwires 56 annealing 56 transistor arrays 56 insulator SOI 56 hydrides 56 pneumatically actuated 56 molecular sieves 56 HBLEDs 56 insulator 56 chemisorption 56 nanopowder 56 input capacitance 56 #.#nm [002] 56 dopant atoms 56 tantalum nitride 56 scintillator 56 cadmium sulphide 56 finFETs 56 electrostatic repulsion 56 reflowed 56 impedance 56 cavity QED 56 hysteresis loop 56 agarose 56 millisecond annealing 56 biomolecule 56 spintronic device 56 thinner wafers 56 polymerization 56 λ 56 vanadium oxide 56 adiabatic 56 differential impedance 56 sol gel 56 line BEOL 56 fs pulses 56 halide 56 magnetic coupling 56 antibody antigen 56 membrane lipids 56 CMOS fabrication 56 thermally conductive 56 protein adsorption 56 crystal oscillator 56 Powerful debug 56 niobium titanium 56 lithium niobate 56 mechanical polishing CMP 56 adsorbate 56 quantum mechanically 56 interposer 56 RF circuitry 56 nanowires 56 electroactive 56 SiGe 56 nanodevice 56 capacitors 56 nanowire transistors 56 nitrides 56 SWNT 56 cadmium selenium 56 exfoliated graphene 56 workpiece 56 melt viscosity 56 .# micron 56 UV photons 56 disulphide 56 planar CMOS 56 nematic 56 photomultipliers 56 analyte 56 micropores 56 thermistor 56 electroless copper 56 piezoelectric crystals 56 parallax barrier 56 InGaAs InP 56 NdFeB 56 graphene nanoribbon 56 PbS 56 GaAs InP 56 bipolar transistors 56 Bose Einstein Condensate 56 electrospray 56 nanoscale 56 macrocycle 56 photomultiplier tubes 56 thiophene 56 bilayers 56 ridge waveguide 56 5nm 56 conjugated polymer 56 epitaxial 56 pellicle 56 chlorine atom 56 electromechanics 56 ultrasonic transducers 56 adatoms 56 solder joints 56 quasicrystal 56 emission wavelength 56 GaAs substrates 56 ferrofluid 56 thermal insulator 56 piezoelectric transducer 56 CIGS Copper Indium 56 bandpass 56 synchronous rectifier 56 emission spectra 56 electrical conductivity 56 dissipative 56 silicon etch 56 iCoupler 56 varistors 56 UVTP 56 quantum metrology 56 femtosecond pulse 56 III nitride 56 carbon nanotube electrodes 56 solder bump 56 microlasers 56 Si Ge 56 Nd YAG 56 DS DBR 56 electron optics 56 frictional resistance 56 micron diameter 56 nanoelectronic devices 56 hydrogen ions 56 epitaxial graphene 56 inductance 56 amorphous silicon Si 56 vanadium dioxide 56 anion 56 parylene 56 nonequilibrium 56 zinc oxide ZnO 56 triac 56 absorber layers 56 aligned carbon nanotubes 56 leadframe 56 polyacrylonitrile 56 temperature coefficients 56 imprint lithography 56 silicon CMOS 56 nanoclusters 56 InP 56 silicon dioxide SiO2 56 polymerized 56 Germanium 56 microfluidic chip 56 nanocubes 56 disulfide 56 RFMD GaN 56 monolithic microwave integrated 56 nickel hydroxide 56 micrometre scale 56 Hytrel 56 pnictides 56 copper indium diselenide 56 superlattices 56 TSVs 56 UV lasers 56 SOI wafer 56 coverslip 56 crosslinking 56 thermodynamically 56 toolholder 56 rotaxanes 56 flyback converter 56 micron thick 56 Photolithography 56 ultrahigh purity 56 chromophores 56 coplanar 56 high temperature superconductor 56 monochromator 56 streptavidin 56 #μm thick [002] 56 microchannel plate 56 2kV 56 Faraday cage 56 porous membranes 56 austenite 56 lithographically 56 absorption spectra 56 dimensional electron 56 microlens array 56 glucose oxidase