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(Click for frequent words.) 73 silicon germanium SiGe 70 photonic devices 69 SiGe 67 low k dielectrics 67 gallium nitride 67 Silicon Germanium 67 k dielectric 67 CMOS transistors 66 silicon CMOS 66 GaN 65 nanoelectronic 65 epitaxial layers 64 silicon transistors 64 SOI CMOS 64 transistor 64 silicon 64 pMOS 64 graphene 64 gate dielectrics 64 CMOS 64 nitride 64 graphene transistors 64 high-k/metal gate 64 #nm silicon 64 InP 64 ferroelectrics 64 SiC 63 k dielectrics 63 RF CMOS 63 #nm CMOS [001] 63 germanium 63 nitride semiconductor 63 gallium arsenide 63 CMOS fabrication 63 MOS transistors 63 photodetectors 63 silicon nanowires 63 silicon substrates 63 planar CMOS 63 #.# micron CMOS 62 FinFET 62 SiGe BiCMOS 62 silicon chips 62 microelectronic devices 62 Strained silicon 62 PZT 62 GaN HEMT 62 nanometer scale 62 indium phosphide 62 quantum dot lasers 62 bismuth telluride 62 electron mobility 62 epitaxial 62 semiconductor nanocrystals 62 nanomembranes 62 carbon nanotube 61 AlGaN GaN 61 antimonide 61 strontium titanate 61 epitaxy 61 BiCMOS 61 dielectrics 61 copper interconnects 61 Insulator SOI 61 III nitride 61 optical waveguides 61 semiconducting 61 barium titanate 61 photonic circuits 61 gallium nitride GaN 61 ferroelectric 61 spintronic 61 mmWave 61 through silicon vias 61 RRAM 61 FinFETs 61 InAs 61 transistors 61 indium phosphide InP 61 CMOS silicon 61 hafnium 60 low k dielectric 60 nMOS 60 bipolar transistors 60 InGaAs 60 heterostructure 60 SiON 60 #.# micron node 60 Gallium arsenide 60 Gallium Nitride 60 silicon substrate 60 optical tweezers 60 transistor HEMT 60 antifuse 60 immersion lithography 60 nanoelectronic devices 60 silicon Si 60 nm SOI 60 indium gallium arsenide 60 semiconducting material 60 carbon nanotubes 60 AlGaN 60 K dielectrics 60 lithographic techniques 60 nanophotonic 60 Spintronics 60 PCMOS 60 chalcogenide 60 semiconductor nanowires 60 ultrasmall 60 nonlinear optical 60 FeRAM 60 electro optic modulator 60 ion traps 60 microfabrication 60 CMOS processes 60 Raman lasers 60 plasmonics 60 gate electrode 59 laterally diffused metal 59 Si substrates 59 thermoelectric materials 59 nickel silicide 59 GaN HEMTs 59 #nm node [001] 59 InGaP 59 SOI silicon 59 quantum metrology 59 nanoporous 59 Germanium 59 superlens 59 Complementary Metal Oxide Semiconductor 59 nanometer 59 silicon photonics 59 photonic crystal 59 gate dielectric 59 CMOS circuits 59 spintronic devices 59 optical lithography 59 dielectric materials 59 Carbon nanotube 59 Metamaterials 59 graphene nanoribbons 59 finFETs 59 micromachining 59 ReRAM 59 VCSELs 59 nm CMOS 59 semiconducting nanowires 59 nanometric 59 Photolithography 59 #nm SOI 59 graphene layers 59 silicon MEMS 59 Plasmonic 59 LDMOS RF power 59 oxide semiconductor 59 insulator SOI technology 58 PMOS transistors 58 silicon Mach Zehnder 58 atomic spectroscopy 58 insulator wafers 58 InGaN 58 CMOS logic 58 CNTs 58 MOS transistor 58 Indium Phosphide 58 spintronics 58 defect densities 58 HKMG 58 #nm lithography [002] 58 clockless 58 silicon nitride 58 epitaxial graphene 58 waveguides 58 indium arsenide 58 LiNbO3 58 quantum dots 58 heterostructures 58 topological insulators 58 nanowire transistors 58 CMOS oscillators 58 manganite 58 silicon nanowire 58 nm CMOS process 58 Phiar 58 insulator SOI 58 deep submicron CMOS 58 high-k/metal-gate 58 wide bandgap 58 vapor deposition 58 photonic bandgap 58 optofluidic 58 semiconducting materials 58 nanodevice 58 nanofluidics 58 micro optics 58 photonic crystals 58 HEMTs 58 #.#μ 58 memristor 58 GaN transistors 58 AlN 58 nanostructured materials 58 .# micron 58 k gate dielectrics 58 #nm/#nm 57 carbon nanotube transistors 57 Indium phosphide 57 nanometer CMOS 57 nanocrystal 57 nanocircuits 57 InSb 57 nanowire arrays 57 carbon nanotube CNT 57 #nm CMOS [002] 57 #.#μm [002] 57 silicon transistor 57 nanotube arrays 57 microfluidics 57 CMOS compatible 57 microelectromechanical systems 57 HEMT 57 metallic nanostructures 57 MRAMs 57 nanotube 57 #.# micron SiGe 57 micromachined 57 photonic 57 high voltage BCDMOS 57 graphene transistor 57 BAW filters 57 HVPE 57 microcavities 57 conductive polymer 57 iCoupler 57 neuromorphic 57 multijunction solar cells 57 TSVs 57 ultrafast laser 57 QCLs 57 phototransistors 57 extreme ultraviolet lithography 57 microcavity 57 sol gel 57 resonators 57 quantum dot 57 ZnO 57 hydride vapor phase 57 nanoribbons 57 k gate dielectric 57 deep sub micron 57 CMOS IC 57 PHEMT 57 hafnium oxide 57 CIGS cells 57 nanophotonics 57 nanometer silicon 57 piezoelectric materials 57 microstructured 57 Memristors 57 monolithically integrated 57 BCDMOS 57 Nanometer 57 photodetector 57 optical interconnects 57 bipolar transistor 57 nanometer nm CMOS 57 epitaxial layer 57 nanoscale 57 microfabrication techniques 57 nanowires 57 JFET 57 nm immersion lithography 57 nano electromechanical systems 56 tunable RF 56 Silicon Germanium SiGe 56 nanowire 56 InN 56 imprint lithography 56 Powerful debug 56 silicon oxynitride 56 MEMs 56 resonant tunneling 56 Gallium Arsenide 56 planar transistors 56 ITRS roadmap 56 nanocluster 56 nanopores 56 Bose Einstein condensates 56 nanomechanical 56 metamaterials 56 microfluidic devices 56 pHEMT 56 photomultipliers 56 superlattice 56 quantum cascade lasers 56 optical modulators 56 nanoelectromechanical systems 56 #nm [001] 56 MAX# integrates 56 dilute nitride 56 RFCMOS 56 nanometer lithography 56 chalcogenides 56 heterojunction bipolar transistor 56 optical lattices 56 Grätzel cells 56 nanofabricated 56 GaN transistor 56 nanopillar 56 zinc oxide nanowires 56 Electron Mobility Transistor 56 deep submicron 56 #nm RF CMOS 56 semiconductive 56 #nm immersion lithography 56 semiconducting properties 56 SOI substrates 56 uniaxial strain 56 photonic integrated circuits 56 nanocomposite material 56 ferroelectric materials 56 RF LDMOS 56 Field Effect Transistor 56 Nanowires 56 tunable filters 56 pentacene 56 SiGe bipolar 56 flexible substrates 56 nanocrystalline 56 micromirror 56 memristors 56 photolithography 56 bandgap 56 MEMS oscillators 56 planar waveguide 56 silicon photonic 56 photonic integrated circuits PICs 56 cryogenically cooled 56 5V CMOS 56 organic TFTs 56 silicon carbide 56 MRAM 56 CMOS MEMS 56 SWCNT 56 lithographic processes 56 smaller geometries 56 plasmonic 56 transparent electrode 56 submicron 56 Flex OneNAND 56 Nanotube 56 InGaP HBT 56 Hafnium 56 UMC #nm 56 crystalline semiconductors 56 Josephson junctions 55 electron beam lithography 55 MEMS resonators 55 zinc selenide 55 nanostructured 55 nanotubes 55 quantum computers 55 millimeter silicon wafers 55 silicon nanocrystals 55 nanodots 55 nanosheets 55 microdevices 55 DongbuAnam 55 nanodevices 55 Silicon germanium 55 film transistors TFTs 55 inductive coupling 55 superconducting 55 wafer dicing 55 pulsed laser deposition 55 nanopillars 55 MESFET 55 optical interconnections 55 calcium fluoride 55 resistors capacitors 55 e beam lithography 55 silicon micromachining 55 carbon nanotube electrodes 55 Integrated Circuits 55 Optical Modulator 55 nanobelts 55 dopants 55 #.#μm CMOS process 55 TFTs 55 Cree GaN 55 eDRAM 55 silicon oxide 55 parasitic capacitance 55 SQUIDs 55 QMEMS 55 microelectronic circuits 55 cadmium selenide 55 high temperature superconductors 55 DSSCs 55 aerogels 55 zeolite membranes 55 Schottky 55 #nm #nm #nm 55 nanoimprinting 55 dye sensitized solar 55 battery anodes 55 optically transparent 55 Strained Silicon 55 STT RAM 55 indium gallium 55 nitrides 55 Tunable 55 Gallium nitride GaN 55 Resistive Random Access 55 vertical cavity 55 shorter wavelengths 55 Semiconducting 55 optical modulator 55 analog circuitry 55 amorphous silicon Si 55 On Insulator SOI 55 transistor amplifier 55 VCSEL 55 SOI substrate 55 silicon waveguides 55 CMOS wafer 55 dielectric etch 55 Indium Phosphide InP 55 microreactors 55 nanolaser 55 ultrafast optical 55 metallic nanoparticles 55 electrically insulating 55 insulator substrate 55 x ray optics 55 polymer membranes 55 chemical vapor deposition 55 temperature superconducting 55 nonvolatile memory 55 SOI wafers 55 VLSI circuits 55 IGBT Insulated Gate 55 CdSe 55 indium antimonide 55 piezoelectric 55 nanofilm 55 perovskite 55 serdes 55 GaSb 55 lithium niobate 55 NMOS 55 SWNTs 55 nanometer transistors 55 SiGe C 55 CMOS photonics 55 optical interconnect 55 MEMS resonator 55 AlGaAs 55 GaN substrates 55 indium gallium arsenide InGaAs 55 reconfigurable computing 55 ferromagnetic 55 TSMC #.#um 55 nanoscale structures 55 nanofabrication techniques 55 SOI Silicon 55 silicon carbide SiC 55 Gallium Arsenide GaAs 55 nm node 55 electrochemical 55 nanolayers 55 semiconductor nanostructures 54 dopant 54 terahertz 54 manufacturable 54 piezoelectrics 54 RF MEMS 54 #nm fabrication 54 electrodeposition 54 porous silicon 54 electrochemical capacitors 54 TQP# 54 indium gallium phosphide InGaP 54 nanometer node 54 embedded DRAM eDRAM 54 Photonic crystals 54 nanolithography 54 gallium indium arsenide 54 Microfluidic 54 silicon waveguide 54 nanocomposites 54 GaN RF 54 Oxide Silicon 54 #nm SoC 54 electro optic polymer 54 reactive ion 54 Ultra wideband 54 photonic crystal fibers 54 #LP [002] 54 polaritons 54 superconductors 54 tunable optical 54 carbon nanofibers 54 BiFET 54 QuantumFilm 54 spintronic device 54 epitaxial structures 54 Bragg grating 54 optical waveguide 54 EUV lithography 54 nanolasers 54 Terahertz 54 Silicon photonics 54 ZnO nanowires 54 photolithographic 54 ferroelectric RAM 54 excitonic 54 voltage CMOS 54 copper indium gallium selenide 54 conjugated polymers 54 eutectic 54 #.#um [001] 54 LDMOS 54 TSMC #nm process 54 Nanophotonics 54 nm lithography 54 sSOI 54 Electrografting 54 wirebond 54 Intermolecular 54 #.#um CMOS 54 dielectric layers 54 nanograss 54 Richard Brilla CNSE 54 computational lithography 54 PIN diode 54 HfSiON 54 ArF immersion lithography 54 nanoimprint 54 micromechanical 54 massively parallel DNA sequencing 54 Transistors 54 microfluidic 54 capacitive touch sensor 54 Schmergel 54 indium gallium nitride InGaN 54 lattice mismatch 54 MMICs 54 FDSOI 54 nonpolar GaN 54 Bernard Kippelen 54 FD SOI 54 nanogenerators 54 interposers 54 nanoelectromechanical 54 #.#μm CMOS 54 microreactor 54 #nm #nm [005] 54 ARM9 core 54 siXis 54 passivation layer 54 nanometer nm NAND flash 54 nano patterning 54 chip SoCs 54 #nm nanometer 54 reconfigurable logic 54 micro electromechanical 54 nanoparticle inks 54 polycrystalline 54 epitaxy HVPE 54 #nm immersion 54 ultrathin 54 terahertz spectroscopy 54 EO polymer 54 photonic integration 54 Nanochip 54 dielectric constant 54 microfabricated 54 ferromagnetic materials 54 nanotube transistor 54 multiferroic 54 Silicon Carbide 54 package SiP 54 CIGS solar cells 54 multichip 54 nm SRAM 54 underfill 54 nanofluidic 54 metallic interconnects 54 #G DQPSK 54 nm DRAM 54 Through Silicon Vias 54 GaAs MESFET 54 RF circuitry 54 waveguide 54 dual damascene 53 multilayers 53 GaAs 53 surface plasmons 53 planar 53 dye sensitized 53 frequency multipliers 53 Miniaturization 53 chalcogenide glass 53 nanocrystals 53 Laser diodes 53 oxynitride 53 plasmons 53 quantum computation 53 microfluidic channels 53 Avouris 53 eWLB technology 53 quantum dot laser 53 dielectric 53 gate transistors 53 MEMS oscillator 53 monolithic CMOS 53 nanofabrication 53 nanocomposite materials 53 High Voltage CMOS 53 thermoelectric coolers 53 multilayer ceramic capacitors MLCC 53 Ferroelectric 53 #nm lithography [001] 53 piezoresistive 53 Spintronic 53 SWNT 53 frequency comb 53 Transistor 53 ultrafast lasers 53 ML#Q# 53 nano fluidic 53 Nanostructured 53 vanadium dioxide 53 electro optic polymers 53 Bipolar Transistor 53 #μm thick [002] 53 terahertz radiation 53 nanostructure 53 epitaxial deposition 53 multiscale 53 Fractional N 53 #Gb NAND flash 53 Elpida #nm 53 cathode materials 53 TSMC #nm [001] 53 high-k/metal gate HKMG 53 PMICs 53 nanosprings 53 transistor circuits 53 hyperlens 53 gallium indium 53 nm 53 #nm NAND flash 53 pseudomorphic 53 nanometer nm 53 UltraCMOS 53 digital isolators 53 Transparent Conductive Oxide TCO 53 UV LEDs 53 thermo mechanical 53 excitons 53 nanopatterning 53 SiC substrates 53 femtosecond laser pulses 53 aluminum nitride 53 Stratix FPGAs 53 quantum mechanical 53 RFMD GaN 53 micromechanical devices 53 Nitride 53 superconducting qubit 53 fiber lasers 53 lithography 53 graphite oxide 53 epi wafers 53 catalytic reactions 53 MEMS microelectromechanical systems 53 antireflective coatings 53 Jean Hoerni 53 silicide 53 indium tin oxide ITO 53 Imec performs world 53 #nm SRAM 53 STMs 53 spiral inductors 53 THz frequencies 53 correlated electron 53 polymer substrates 53 nm nodes 53 walled carbon nanotube 53 ZnS 53 Optical Interconnect 53 heavy fermion 53 pn junctions 53 magnetron 53 polariton 53 Epitaxial 53 Immersion Lithography 53 erbium doped fiber 53 metal oxide 53 SiT# 53 InP substrates 53 microfluidic chips 53 bilayer graphene 53 ARM# MPCore processor 53 electrospinning 53 Kippelen 53 DiCon 53 triplexer 53 nanomagnets 53 CMOS RF 53 quantum cascade 53 breakdown voltages 53 Si substrate 53 inorganic semiconductors 53 superlenses 53 AFMs 53 nano scale 53 ultraviolet lasers 53 ZnSe 53 CoolPAM 53 supercapacitors 53 nm immersion 53 nanoscale transistors 53 nanoscale patterning 53 epiwafer 53 aluminum nitride AlN 53 #nm DRAM 53 nano imprint 53 #.#um [002] 53 Nantero 53 analog circuits 53 RFIC 53 1Gbit DDR2 53 microelectromechanical systems MEMS 53 MWNTs 53 SiBeam 53 microfluidic chip 53 vanadium oxide 53 gallium indium phosphide 53 lightwave 53 embedded passives 53 single photon detectors 53 Silicon CMOS Photonics 53 nanoimprint lithography 53 microscopy techniques 53 #nm photomask 53 Serdes 53 electroactive 53 nanochannel 53 electrospinning technique 53 nvSRAM 53 epiwafers 53 effect transistors FETs 53 thermoacoustic 53 Nova NanoSEM 53 thermal conductivity 53 millimeter wave frequencies 53 Austriamicrosystems 53 photodiode arrays 53 supercritical fluids 53 Nanowire 53 Gallium Nitride GaN 53 BGA packaging 53 CMOS scaling 53 nanochannels 53 threshold voltages 53 #Gbit [001] 53 microelectromechanical 53 germanium substrates 53 2Gb DDR3 53 CIGS copper indium 52 dispersive 52 bioelectronic 52 GaN LEDs 52 MOCVD 52 SiO 2 52 selenide 52 Schottky barrier 52 indium tin oxide 52 micromorph 52 self assembled monolayer 52 SiPs 52 SiP 52 Lithium Niobate 52 solar cells 52 Photonic 52 SRAMs 52 #nm node [002] 52 SOI 52 Carbon Nanotube 52 intermetallic 52 dimensional nanostructures 52 stripline 52 hafnium dioxide 52 Gerbrand Ceder 52 electron tunneling 52 aluminum gallium nitride 52 scintillator 52 graphene sheets 52 gallium phosphide 52 quantum computing 52 Zenasis 52 superconducting quantum 52 RF IC 52 CMOS complementary 52 GaAs substrates 52 GaAs GaN 52 #nm nodes 52 VCOs 52 ferromagnet 52 biological macromolecules 52 1T FLASH 52 Intel #P chipset [001] 52 GaN layer 52 Quantum dots 52 MRAM chips 52 heterogeneous catalysis 52 indium gallium phosphide 52 magnetoresistive random access 52 polymer membrane 52 Supercapacitors 52 Mbit MRAM 52 combinatorial synthesis 52 giant magnetoresistance GMR 52 Silicon Photonics 52 Deep Reactive Ion Etching 52 Si Ge 52 SIMOX 52 microchannel 52 transistor scaling 52 photomultiplier tubes 52 AlN layer 52 silicon dioxide 52 quasicrystals 52 nanoribbon 52 Z RAM 52 crystal lattices 52 serializer deserializer 52 4Mbit 52 WLCSP 52 MEMS 52 CMOS BiCMOS 52 piezoelectric ceramic 52 heterojunction 52 ElectroPhen 52 atomically precise 52 nm NAND flash 52 carbon nanotubes CNTs 52 micropumps 52 terahertz frequencies 52 RF transistors 52 sensor arrays 52 nanomesh 52 ferromagnetism 52 embedded NVM 52 functionalizing 52 Memristor 52 electrically conducting 52 photocatalysis 52 photoresists 52 ATRP 52 semiconducting nanotubes 52 FineSim Pro 52 BEOL 52 ULSI 52 Nanostructures 52 tunable lasers 52 NiSi 52 GaN wafers 52 scanning tunneling microscope STM 52 #GHz [001] 52 kit PDK 52 Nanoelectronic 52 compressive strain 52 #nm VCSEL [001] 52 conductive polymers 52 membrane distillation 52 lead zirconate titanate 52 transceiver IC 52 terahertz THz 52 conductive inks 52 ferrite beads 52 Graphene 52 focused ion beam 52 miniaturization 52 nanoscale dimensions 52 Quantum Dot 52 ion trap 52 bismuth ferrite 52 programmable SoC 52 opto electronic 52 aluminum arsenide 52 magnetron sputtering 52 monolithic microwave integrated 52 superpositions 52 PEDOT 52 Cell MLC 52 thermally conductive 52 electroactive polymers 52 MLC NAND Flash 52 optical microscopy 52 CMOS ICs 52 quantum chromodynamics 52 Nanopores 52 microchannels 52 Micromorph 52 photocatalysts 52 Altera Stratix III 52 QDs 52 sputter deposition 52 silicate glass 52 hydrides 52 millimeter wave mmWave 52 transparent electrodes 52 3D TSVs 52 Nanocrystals 52 microscale 52 fluorescent probes 52 fpgas 52 exciton 52 substrate 52 Eudyna 52 eGaN 52 magnetrons 52 modulators 52 undoped 52 nonlinear optics 52 dye molecules 52 Perpendicular recording 52 subwavelength 52 Ultra Wideband 52 Prof Geim 52 Si SiGe 52 silicon atoms 52 transparent conductive coatings 52 SiC Schottky diodes 52 interferometers 52 A9 processor 52 tin oxide 52 conductive adhesives 52 Sanger sequencing 52 Silicon carbide 52 silicon wafer 52 DrMOS 52 Kovio 52 airgap 52 absorption spectroscopy 52 terahertz imaging 52 silicon integrated circuits 52 CMOS circuitry 52 C#F# [001] 52 metal gate HKMG 52 nanoscopic 52 BioMark HD System 52 FBAR filters 52 boron nitride 52 baseband chip 52 multicore architecture 52 block copolymer 52 superconducting quantum interference 52 macroscale 52 superparamagnetic 52 SMARTMOS 52 Buried Wordline technology 52 nanometers nm 52 electron transistor 52 nanomanufacturing 52 metallisation 52 TOF TOF 51 mm wafers 51 nanorings 51 HV HBT 51 multipartite entanglement 51 crystallinity 51 nanostructures 51 ferro electric 51 SoC 51 optical spectroscopy 51 superlattices 51 Ferroelectric Random Access 51 GaAs InP 51 sq. mm 51 computational complexity 51 transparent conductive 51 Chip Scale 51 Raman spectroscopy 51 bistable 51 ferrite 51 superconducting cables 51 diode lasers 51 high temperature superconductivity 51 organic photovoltaics 51 bandgaps 51 HKMG technology 51 inductors