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(Click for frequent words.) 72 substrate 72 silicon substrates 69 silicon oxide 69 gate electrode 69 graphene layers 68 indium arsenide 67 dielectric layers 67 strontium titanate 66 graphene sheets 66 nanoribbons 66 oxide layer 66 monolayer 66 nanowire 65 solder bumps 65 Si substrate 65 silicon nitride 65 dielectric layer 65 AlGaN 64 microcavity 64 crystallinity 64 AlN layer 64 Si substrates 64 barium titanate 64 zirconium nitride 64 nanowires 64 microcavities 64 graphene sheet 63 eutectic 63 semiconducting 63 nanotube 63 through silicon vias 63 nanoporous 63 gate dielectrics 63 photodetector 63 waveguides 63 nanopillars 63 flexible substrates 63 monolayers 63 dopant 63 optical waveguides 62 SiO 2 62 SWCNT 62 nanotubes 62 zinc oxide nanowires 62 silicate glass 62 sapphire substrate 62 CMOS circuits 62 silicon wafer 62 nanotube arrays 62 epitaxially 62 heterostructure 62 silicon waveguide 62 silicon dioxide 62 microchannels 62 aluminum nitride 62 CMOS transistors 62 InGaAs 62 electrode 62 pentacene 62 multilayers 62 dielectric materials 62 silicide 62 gate dielectric 62 GaN layer 62 dopants 61 nitride 61 ZnO 61 polymer membrane 61 Schottky barrier 61 nanobelts 61 graphene 61 InP 61 graphite oxide 61 heterostructures 61 glass substrate 61 nanostructures 61 CNTs 61 indium gallium arsenide 61 dielectrics 61 GaN layers 61 AlN 61 epitaxial 61 photoresist 61 excitons 61 palladium nanoparticles 61 semiconductor nanocrystals 61 μm thick 60 silica spheres 60 silicon nanowires 60 nanocrystal 60 nanostructure 60 dye molecules 60 self assembled monolayer 60 silicon 60 semiconductor nanowires 60 silicon Si 60 bilayer 60 MWCNTs 60 micrometer scale 60 silicon nanoparticles 60 nanocrystals 60 GaAs substrate 60 silicon germanium 60 substrates 60 carbon nanotubes 60 superlens 60 photonic crystal 60 micrometer sized 60 conductive epoxy 60 nanodots 60 nanometer scale 60 electrically insulating 60 electrochemically 60 PZT 60 waveguide 60 micrometre scale 60 nanoribbon 60 ZnS 60 epitaxial layer 60 NWs 60 pMOS 60 photodetectors 60 metallization 60 tin oxide 60 microfluidic channels 60 aluminum arsenide 60 polymer matrix 60 AlGaN GaN 60 nanocrystalline 60 InGaN 60 dielectric 60 superlattice 60 nanoscopic 60 passivated 59 germanium 59 nanometric 59 optical waveguide 59 CdSe 59 QDs 59 micromachined 59 MWNT 59 GaN substrates 59 InAs 59 indium phosphide 59 silicon waveguides 59 MOS transistors 59 transparent conductive 59 lithographically patterned 59 nanochannels 59 FinFET 59 titanium oxide 59 microstructures 59 epitaxy 59 SOI substrate 59 AlGaAs 59 sol gel 59 crystal lattices 59 SWNT 59 k dielectric 59 micron thick 59 boron nitride 59 optically transparent 59 hollow spheres 59 CMOS circuitry 59 subwavelength 59 carbon nanotube 59 hafnium oxide 59 μm diameter 59 conduction electrons 59 photodiode 59 epitaxial layers 59 gallium nitride 59 nanopillar 59 lanthanum aluminate 59 ZnSe 59 passivation layer 58 nanofilm 58 nanorods 58 organic TFTs 58 exciton 58 diffraction grating 58 microfabrication 58 anode 58 YBCO 58 SWNTs 58 chalcogenide 58 low k dielectric 58 silicon atoms 58 block copolymer 58 semiconducting nanowires 58 bandgap 58 CIGS solar cells 58 SiON 58 ZnO nanowires 58 carbon nanotube CNT 58 film transistors TFTs 58 pn junction 58 atomic lattice 58 calcium fluoride 58 insulating substrate 58 pn junctions 58 photolithographic 58 leadframe 58 Bragg grating 58 conductive polymer 58 microchannel 58 ferromagnet 58 MWNTs 58 Gallium arsenide 58 polymeric 58 nanodiamond 58 semiconductive 58 photoconductive 58 #μm [002] 58 vias 58 mesoporous 58 doped silicon 58 ferromagnetic 58 FinFETs 58 planar 58 photonic devices 58 Cu interconnects 58 5μm 58 gallium arsenide 58 monolithically integrated 58 quantum dot 58 titania 58 indium tin oxide ITO 58 silicon nanowire 58 functionalized 58 cadmium sulfide 57 alternating layers 57 solder bumping 57 electrically conductive 57 microlenses 57 germanium substrates 57 TSVs 57 nanochannel 57 cadmium selenide 57 microscale 57 piezoelectric ceramic 57 membrane pores 57 polymer substrate 57 ferroelectric 57 reactive ion 57 transistor 57 #.#um [001] 57 nanospheres 57 colloidal crystal 57 nanowire arrays 57 agarose 57 photolithography 57 PEDOT 57 nitride layer 57 aluminum oxide 57 nanorod 57 micrometer thick 57 PEDOT PSS 57 microstructured 57 polymer nanofibers 57 nanostructured silicon 57 manganite 57 nanomembranes 57 resonator 57 TFTs 57 submicron 57 1μm 57 singulation 57 nanomesh 57 hollow nanospheres 57 macroscale 57 bismuth telluride 57 microelectronic devices 57 electrically conducting 57 honeycomb structure 57 coercivity 57 electrodeposition 57 manganese atoms 57 MWCNT 57 polariton 57 undoped 57 wettability 57 yttrium barium copper 57 crystal lattice 57 resistive element 57 superparamagnetic 57 focused ion beam 57 metallic nanostructures 57 metallisation 57 SOI wafer 57 polymer membranes 57 nano scale 57 silicon germanium SiGe 57 silicon transistors 57 antiferromagnetic 57 compressive stresses 57 silica substrate 57 #μm thick [002] 57 toroid 56 membrane 56 photodiodes 56 diffracted 56 photonic bandgap 56 InSb 56 ion traps 56 cobalt atoms 56 nanofabricated 56 coverslip 56 plasmon 56 GaP 56 silicon nanocrystals 56 interfacial 56 porous silica 56 nucleation layer 56 epitaxial graphene 56 atomically smooth 56 silica particles 56 polycrystalline 56 selenide 56 sulfur atoms 56 metal oxide 56 micromirror 56 SiO2 56 LiNbO3 56 polymer 56 underfill 56 nanometer silicon 56 quantum dots 56 nanocubes 56 polydimethylsiloxane 56 nonpolar 56 compressive stress 56 ceria 56 semiconducting materials 56 defect densities 56 amorphous silicon Si 56 microfabricated 56 ohmic contacts 56 NiSi 56 valence band 56 submicrometer 56 liquid electrolyte 56 wafer dicing 56 copper indium diselenide 56 dopant atoms 56 colloidal crystals 56 tensile strain 56 crystallites 56 resonators 56 nanostructured 56 leadframes 56 boron atoms 56 nanodevice 56 pulsed laser deposition 56 nanopowder 56 transparent electrode 56 walled carbon nanotube 56 Bragg reflector 56 gallium phosphide 56 gallium selenide 56 zinc sulfide 56 biaxial 56 microfluidic devices 56 SOI substrates 56 cesium ions 56 CIGS cells 56 semiconducting properties 56 nanolayers 56 Nanowires 56 lattice mismatch 56 anneal 56 THz radiation 56 parylene 56 nanograss 56 nanocages 56 Josephson junctions 56 graphene membranes 55 polyimide 55 porous silicon 55 insulator wafers 55 TiN 55 vapor deposition 55 nonmagnetic 55 layer graphene 55 linearly polarized 55 phototransistor 55 SOI CMOS 55 ceramic substrate 55 electrochemical 55 anodic 55 ferrite 55 graphene oxide 55 AFM cantilever 55 zirconium oxide 55 nanoprobe 55 tensile stress 55 graphene transistors 55 microfluidic 55 amorphous silicon 55 solder joints 55 quasicrystal 55 semiconducting nanotubes 55 single walled nanotubes 55 conformal 55 nanotubes nanowires 55 nonconducting 55 semiconducting material 55 fused silica 55 gold nanorods 55 toroids 55 reflowed 55 streptavidin 55 tetrahedral 55 thermally stable 55 photonic circuits 55 GaAs substrates 55 nMOS 55 graphene flakes 55 electron mobility 55 nanostructured materials 55 anionic 55 atomically thin 55 compressive strain 55 nanosheets 55 silicon oxynitride 55 catalytic reactions 55 manganese oxide 55 piezoelectric properties 55 evanescent waves 55 dipole moment 55 antireflective coating 55 polymer fibers 55 microwires 55 macroporous 55 PbS 55 poly Si 55 self assembled monolayers 55 electrodes 55 lipid bilayer 55 dimensional nanostructures 55 III nitride 55 heterojunction 55 plasmons 55 inorganic materials 55 CIGS copper indium 55 annealed 55 hollow cylinders 55 solar cells 55 microdevices 55 SWCNTs 55 vertical cavity 55 interfacial layer 55 nanoscale 55 heterojunctions 55 GaN 55 silicon wafers 55 electron transistor 55 insulator substrate 55 microfabrication techniques 55 lead zirconate titanate 55 bandgaps 55 epitaxial wafers 55 anisotropic 55 ferroelectrics 55 nanoparticle inks 55 oxynitride 55 lithographic processes 55 atomically flat 55 copper interconnects 55 silicon photonic 55 optical lattice 55 Photolithography 55 scintillator 55 nanoelectromechanical 55 #.#μm [001] 55 dual damascene 55 electron spins 55 electrostatically 55 rubidium vapor 55 CMOS fabrication 55 surface passivation 55 walled carbon nanotubes 55 solder bump 55 GaN transistor 54 metallic nanoparticles 54 aluminum gallium arsenide 54 metastable 54 transistor arrays 54 bilayer graphene 54 gallium indium arsenide 54 inorganic LEDs 54 nanoparticle 54 MOS transistor 54 sulfur atom 54 aerogels 54 lithographically 54 phototransistors 54 rubidium atom 54 membranes 54 silicon interposer 54 chromophores 54 surface plasmon 54 martensite 54 microfluidic device 54 etchant 54 HVPE 54 CMOS wafer 54 molten solder 54 wafer bonding 54 nanocrystalline silicon 54 Czochralski 54 titanium nitride 54 indium tin oxide 54 inorganic semiconductors 54 photoresists 54 graphene nanoribbons 54 #.# micron node 54 infrared laser beam 54 diffraction pattern 54 intramolecular 54 superlattices 54 borosilicate glass 54 #μm [001] 54 Novellus SABRE 54 gallium indium phosphide 54 graphene ribbons 54 microporous 54 ferrofluid 54 terahertz radiation 54 polymer nanocomposite 54 spherical particles 54 intermetallic 54 CIGS solar cell 54 nitride semiconductor 54 polaritons 54 indium gallium arsenide InGaAs 54 BEOL 54 ferromagnetic materials 54 scanning tunneling microscopy 54 intermolecular 54 #.#μm CMOS process 54 microvia 54 #nm silicon 54 antireflective 54 Insulator SOI 54 #.# micron CMOS 54 austenitic stainless steel 54 crystalline silicon wafers 54 nanoclusters 54 SOI silicon 54 Germanium 54 epiwafer 54 nanopores 54 graphane 54 CdS 54 thermally conductive 54 tetrahedra 54 planarization 54 glass frit 54 silica nanoparticles 54 nanomagnets 54 annealing 54 zinc ions 54 lamella 54 spherical nanoparticles 54 optically 54 donor acceptor 54 nanosprings 54 k dielectrics 54 microfluidic chip 54 micromachining 54 epi wafers 54 dielectric constant 54 silicone encapsulation 54 lattice vibrations 54 dye sensitized cells 54 CdTe 54 titania nanotubes 54 microlens 54 HfSiON 54 #μ 54 silicon crystals 54 transparent electrodes 54 thermo mechanical 54 PIN diode 54 nanorings 54 photochemically 54 TFT substrate 54 thermoplastic polymer 53 encapsulant 53 electron tunneling 53 SiC 53 epoxy matrix 53 GaN substrate 53 graphene oxide sheets 53 polymerized 53 capillary tubes 53 thermally 53 bipolar transistor 53 HEMT 53 nanofibres 53 microcrystalline 53 MEMS resonators 53 microvias 53 scanning tunneling microscope 53 helium ions 53 uniaxial 53 copper indium gallium diselenide 53 nano patterning 53 optically coupled 53 solder mask 53 wirebond 53 cadmium telluride CdTe 53 2μm 53 magnetisation 53 meta atoms 53 nanoparticles 53 oppositely charged 53 2nm 53 thermally activated 53 piezoresistive 53 nanoholes 53 electrospray 53 potassium niobate 53 PHEMT 53 Josephson junction 53 titanate 53 elastic modulus 53 multiwalled carbon nanotubes 53 ZnO nanowire 53 aluminum fins 53 pellicle 53 microcrystalline silicon 53 gold nanoclusters 53 nanosilicon 53 biomolecule 53 unpatterned 53 #.#nm [002] 53 piezoelectric crystal 53 micron diameter 53 InGaP 53 VCSELs 53 polymer electrolyte 53 capacitor 53 silicon chips 53 Silicon dioxide 53 Schottky 53 thermal conduction 53 transistors 53 vanadium dioxide 53 bistable 53 magnetization 53 agarose gel 53 Carbon nanotube 53 wafer thickness 53 photoluminescence 53 optical resonator 53 optically pumped 53 overmolding 53 semiconductor wafers 53 HEMTs 53 parasitic capacitance 53 solder paste 53 InP substrates 53 sputter deposition 53 dewetting 53 transistor circuits 53 resonant cavity 53 Indium Phosphide 53 HfO2 53 monolithic CMOS 53 copper metallization 53 airgap 53 Powerful debug 53 ultraviolet lasers 53 micrometre 53 epitaxially grown 53 photolithographic techniques 53 cesium vapor 53 spheroidal 53 nano structured 53 planar antennas 53 Strained silicon 53 geometries shrink 53 nanometers thick 53 polymeric membrane 53 nickel silicide 53 electroless plating 53 polyaniline 53 superconductive 53 zinc selenide 53 cadmium sulphide 53 silicon MEMS 53 micrometers thick 53 GaN nanowires 53 colloidal suspension 53 coextrusion 53 ultraviolet curable 53 phosphorus atoms 53 mount SMT 53 pearlite 53 enhanced Raman spectroscopy 53 absorber layers 53 wafer thinning 53 Fabry Perot 53 ferroelectric materials 53 electrically isolated 53 conjugated polymer 53 lithographic techniques 53 nanometer sized 53 Transparent Conductive Oxide TCO 53 #nm immersion lithography 53 chemically bonded 53 Semiconducting 53 Mott insulator 53 controllably 53 plasma etching 53 nanoscale structures 53 VCSEL 53 terahertz frequencies 53 Complementary Metal Oxide Semiconductor 53 carbon nanotube arrays 53 photomultiplier 53 microcantilever 53 indium gallium nitride InGaN 53 hydride vapor phase 53 conductive inks 53 erbium 53 antireflection 53 nanoscale dimensions 53 etching DRIE 53 diffractive 53 CMOS compatible 53 nanosized 53 microfluidic chips 53 polystyrene beads 52 transparent conductive coatings 52 micro optics 52 photocatalyst 52 capacitors 52 transparent conductive oxide 52 multijunction solar cells 52 semiconducting polymer 52 CIGS Copper Indium 52 spiral inductors 52 interposer 52 polymeric materials 52 crystallite 52 electrostatic attraction 52 conductivities 52 Nova NanoSEM 52 workpiece 52 emission spectroscopy 52 magnetic particles 52 nanolayer 52 passivation 52 carbon nanotubes CNT 52 fluorescent molecules 52 silicon cantilever 52 polymerisation 52 effect transistors FETs 52 Cadmium Telluride CdTe 52 nanocomposite material 52 indium gallium nitride 52 heat spreader 52 diodes 52 nonlinear optical 52 parallax barrier 52 colloidal quantum dots 52 silicon carbide wafers 52 sintered 52 5nm 52 collimators 52 covalent bond 52 Epitaxial 52 photonic crystal fiber 52 micron 52 SDS PAGE 52 conjugated polymers 52 Plasmonic 52 #.#mm# [002] 52 scanning tunneling microscope STM 52 paramagnetic 52 chalcogenides 52 liposome 52 LTPS TFT 52 geometries 52 copper nanorods 52 photocurrent 52 NMOS 52 dielectrophoresis 52 SiC substrates 52 nanopatterned 52 ultrasonic vibrations 52 elastic deformation 52 microelectromechanical systems MEMS 52 carbon nanotube transistors 52 polymer coating 52 valence electrons 52 multilayer ceramic 52 hexagonal lattice 52 metamaterial 52 nanodroplets 52 wire bondable 52 indium phosphide InP 52 microtubes 52 polyvinylidene fluoride 52 orbitals 52 electronic excitations 52 cuvette 52 microelectrodes 52 polystyrene spheres 52 nanofiber 52 MoS2 52 magnetic bead 52 silicon carbide 52 desorbed 52 magnetron sputtering 52 transmissive 52 nanofilms 52 isotropic 52 imprint lithography 52 wafer 52 monochromator 52 intergranular 52 bipolar transistors 52 advanced leadframe 52 ring resonators 52 agglomerates 52 photoactive 52 semiconducting tubes 52 CCD detector 52 FEOL 52 stripline 52 nanoglue 52 ultrathin layer 52 bismuth ferrite 52 Si SiGe 52 crystalline silicon c 52 photomultipliers 52 photoconversion 52 micropipette 52 crosslinked 52 microgel 52 hafnium dioxide 52 plasmonic 52 fluorescence intensity 52 interdigitated 52 e beam lithography 52 PMOS transistors 52 atoms 52 topological insulators 52 nanometers billionths 52 nanosized particles 52 block copolymers 52 hydrophobic surfaces 52 capacitive coupling 52 nanoantenna 52 MQW 52 coaxially 52 nanowire transistors 52 porous membrane 52 graphitic carbon 52 nanobubbles 52 polymethyl methacrylate PMMA 52 magnesium ion 52 Grätzel cells 52 carbon nanotubes CNTs 52 oxide 52 hydrophobicity 52 micron sized 52 supramolecular 52 radially 52 GaN wafers 52 nanotechnology microsystems 52 magnesium fluoride 52 superconducting qubit 52 aqueous solution 52 antiferromagnets 52 electron scattering 52 prolate 52 functionalizing 52 polydimethylsiloxane PDMS 52 multiphoton 52 vibrational modes 52 Silicon wafers 52 APTIV film 52 HiPco 52 multi walled nanotubes 52 nano crystals 52 hydrides 52 beryllium ions 52 carbon nanotube electrodes 52 pentacene molecule 52 Gallium Arsenide 52 terahertz waves 52 antireflective coatings 52 CIS CIGS 52 surface plasmons 52 hydroxide ions 52 Ge substrates 52 #nm CMOS [002] 52 interlayer 52 #um [002] 52 transparent conductive oxides 52 Si wafers 52 emitting lasers 52 filamentary 52 pyroelectric 52 rotaxanes 52 resonant tunneling 52 nano particle 52 QFPs 52 molecular sieves 52 diamagnetic 52 graphene nanoribbon 52 covalent bonds 52 beamsplitters 52 boron nitride nanotubes 52 chlorine atom 52 indium gallium phosphide InGaP 52 quantum metrology 52 collimated 52 microstrip 52 polymer substrates 52 nanosphere 52 nanomechanical 52 cesium atoms 51 chemical vapor deposition 51 organic photovoltaics 51 perovskite 51 indium gallium phosphide 51 polytetrafluoroethylene PTFE 51 adatoms 51 cathodes 51 piezoelectric 51 poly L lysine 51 silicon PV modules 51 magnetic nanoparticles 51 surface roughness 51 #.#um CMOS process 51 conductive coating 51 helium atoms 51 cathode 51 #nm CMOS [001] 51 gallium indium 51 magnesium oxide 51 photothermal 51 nanoelectronic devices 51 CMOS silicon 51 gallium nitride GaN 51 Polycrystalline 51 unpolarized 51 femtosecond pulse 51 mount inductors 51 photobleaching 51 microchannel plate 51 optofluidic 51 Hydrogen atoms 51 thermal decomposition 51 SOI wafers 51 inorganic compounds 51 titanium carbide 51 hydrophilic polymer 51 colloidal particles 51 siloxane 51 monodisperse 51 Amorphous silicon 51 helical structures 51 cerium oxide 51 liquid crystal polymer 51 superlenses 51 soliton 51 silicon micromachining 51 silicon CMOS 51 periosteum 51 beam splitter 51 redox reactions 51 TiO 2 51 aluminum gallium nitride 51 di selenide CIGS 51 chromophore 51 insulating layer 51 GaN wafer 51 polymers 51 metallic nanotubes 51 silicon etch 51 nanolithography 51 refractive index 51 filament 51 oxide thickness 51 Ascentis Express 51 microreactors 51 quasicrystals 51 optical microscope 51 photoelectrochemical 51 micromechanical 51 cadmium telluride 51 indium gallium